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Title: Formation processes of nanometer sized particles in low pressure Ar/CH{sub 4} rf plasmas

Abstract

In this paper, formation and growth processes of nanometer and micrometer sized dust particles in low pressure Ar/CH{sub 4} rf (13.56 MHz) plasmas are investigated as function of temperature in the range 25-100 deg. C. During experiments the pressure was typically 0.8 mbar and the forward power to the plasma was {approx}70 Watt. Measuring the fundamental voltage, current and phase angle together with their harmonics (up to the fourth) gives a good method to monitor the creation and growth of these dust particles in time. Furthermore, laser light scattering measurements are performed to give information about the dust particle density. It has been shown that dust particle formation in these conditions depends greatly on temperature.

Authors:
;  [1]
  1. Eindhoven University of Technology, Department of Applied Physics P.O. box 513, 5600 MB, Eindhoven (Netherlands)
Publication Date:
OSTI Identifier:
21251215
Resource Type:
Journal Article
Journal Name:
AIP Conference Proceedings
Additional Journal Information:
Journal Volume: 1041; Journal Issue: 1; Conference: 5. international conference on the physics of dusty plasmas, Ponta Degada, Azores (Portugal), 18-23 May 2008; Other Information: DOI: 10.1063/1.2996782; (c) 2008 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 0094-243X
Country of Publication:
United States
Language:
English
Subject:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY; COLLISIONS; DUSTS; ELECTRIC CURRENTS; ELECTRIC POTENTIAL; HARMONICS; LASERS; LIGHT SCATTERING; MAGNETOHYDRODYNAMICS; METHANE; MHZ RANGE; PARTICLES; PLASMA; PLASMA DENSITY; PLASMA PRODUCTION; RF SYSTEMS; TEMPERATURE DEPENDENCE

Citation Formats

Beckers, J, Vacaresse, G. D. G. J., and Stoffels, W W. Formation processes of nanometer sized particles in low pressure Ar/CH{sub 4} rf plasmas. United States: N. p., 2008. Web. doi:10.1063/1.2996782.
Beckers, J, Vacaresse, G. D. G. J., & Stoffels, W W. Formation processes of nanometer sized particles in low pressure Ar/CH{sub 4} rf plasmas. United States. https://doi.org/10.1063/1.2996782
Beckers, J, Vacaresse, G. D. G. J., and Stoffels, W W. 2008. "Formation processes of nanometer sized particles in low pressure Ar/CH{sub 4} rf plasmas". United States. https://doi.org/10.1063/1.2996782.
@article{osti_21251215,
title = {Formation processes of nanometer sized particles in low pressure Ar/CH{sub 4} rf plasmas},
author = {Beckers, J and Vacaresse, G. D. G. J. and Stoffels, W W},
abstractNote = {In this paper, formation and growth processes of nanometer and micrometer sized dust particles in low pressure Ar/CH{sub 4} rf (13.56 MHz) plasmas are investigated as function of temperature in the range 25-100 deg. C. During experiments the pressure was typically 0.8 mbar and the forward power to the plasma was {approx}70 Watt. Measuring the fundamental voltage, current and phase angle together with their harmonics (up to the fourth) gives a good method to monitor the creation and growth of these dust particles in time. Furthermore, laser light scattering measurements are performed to give information about the dust particle density. It has been shown that dust particle formation in these conditions depends greatly on temperature.},
doi = {10.1063/1.2996782},
url = {https://www.osti.gov/biblio/21251215}, journal = {AIP Conference Proceedings},
issn = {0094-243X},
number = 1,
volume = 1041,
place = {United States},
year = {Sun Sep 07 00:00:00 EDT 2008},
month = {Sun Sep 07 00:00:00 EDT 2008}
}