Improved optical and electrical properties of rf sputtered Al doped ZnO films on polymer substrates by low-damage processes

Journal Article · Sun Mar 15 00:00:00 EDT 2009 · Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films

DOI:https://doi.org/10.1116/1.3081966· OSTI ID:21195009

Min, Hyung Seob; Yang, Min Kyu; Lee, Jeon-Kook ^[1]

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1. Materials Science and Technology Research Division, Korea Institute of Science and Technology, Seoul 136-791 (Korea, Republic of)

Three types of low-damage radio-frequency (rf) magnetron sputtering processes--an interruptive process, a rotating cylindrical holder method, and an off-axis sputtering method--were designed and studied to reduce the film surface temperature during deposition. Low-damage sputtering processes were investigated to improve the resistivity and optical transmittance in the visible range of Al doped ZnO (AZO) thin films deposited on polymer substrates. In the case of the polyethersulfone substrate, AZO films with a resistivity of 1.0x10{sup -3} {omega} cm and an optical transmittance of 75% were obtained by the rotating repeat holder method during rf sputtering.

• OSTI ID: 21195009
• Journal Information: Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films, Vol. 27, Issue 2; Other Information: DOI: 10.1116/1.3081966; (c) 2009 American Vacuum Society; Country of input: International Atomic Energy Agency (IAEA); ISSN 1553-1813
• Country of Publication: United States
• Language: English

Related Subjects

75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALUMINIUM
CYLINDRICAL CONFIGURATION
DAMAGE
DEPOSITION
DOPED MATERIALS
ELECTRIC CONDUCTIVITY
MAGNETRONS
OMEGA BARYONS
OPTICAL PROPERTIES
POLYMERS
RADIOWAVE RADIATION
SEMICONDUCTOR MATERIALS
SPUTTERING
SUBSTRATES
SURFACES
THIN FILMS
VISIBLE SPECTRA
ZINC OXIDES