Electromagnetic field distribution calculation in solenoidal inductively coupled plasma using finite difference method
- Institute for Electrical Light Sources, Fudan University, Shanghai 200433 (China)
The electromagnetic field (both E and B fields) is calculated for a solenoidal inductively coupled plasma (ICP) discharge. The model is based on two-dimensional cylindrical coordinates, and the finite difference method is used for solving Maxwell equations in both the radial and axial directions. Through one-turn coil measurements, assuming that the electrical conductivity has a constant value in each cross section of the discharge tube, the calculated E and B fields rise sharply near the tube wall. The nonuniform radial distributions imply that the skin effect plays a significant role in the energy balance of the stable ICP. Damped distributions in the axial direction show that the magnetic flux gradually dissipates into the surrounding space. A finite difference calculation allows prediction of the electrical conductivity and plasma permeability, and the induction coil voltage and plasma current can be calculated, which are verified for correctness.
- OSTI ID:
- 21185866
- Journal Information:
- Journal of Applied Physics, Vol. 104, Issue 8; Other Information: DOI: 10.1063/1.3000672; (c) 2008 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0021-8979
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
GENERAL PHYSICS
COORDINATES
CROSS SECTIONS
CYLINDRICAL CONFIGURATION
ELECTRIC CONDUCTIVITY
ELECTRIC CURRENTS
ELECTRIC DISCHARGES
ELECTRIC POTENTIAL
ELECTROMAGNETIC FIELDS
ENERGY BALANCE
FINITE DIFFERENCE METHOD
MAGNETIC FLUX
MAXWELL EQUATIONS
PERMEABILITY
PLASMA
PLASMA SIMULATION
SKIN EFFECT
SPATIAL DISTRIBUTION
TWO-DIMENSIONAL CALCULATIONS