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Title: Deterministic convergence in iterative phase shifting

Abstract

Previous implementations of the iterative phase shifting method, in which the phase of a test object is computed from measurements using a phase shifting interferometer with unknown positions of the reference, do not provide an accurate way of knowing when convergence has been attained. We present a new approach to this method that allows us to deterministically identify convergence. The method is tested with a home-built Fizeau interferometer that measures optical surfaces polished to {lambda}/100 using the Hydra tool. The intrinsic quality of the measurements is better than 0.5 nm. Other possible applications for this technique include fringe projection or any problem where phase shifting is involved.

Authors:
; ; ; ; ;
Publication Date:
OSTI Identifier:
21176033
Resource Type:
Journal Article
Journal Name:
Applied Optics
Additional Journal Information:
Journal Volume: 48; Journal Issue: 8; Other Information: DOI: 10.1364/AO.48.001494; (c) 2009 Optical Society of America; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 0003-6935
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; CONVERGENCE; IMPLEMENTATION; INTERFEROMETERS; ITERATIVE METHODS

Citation Formats

Luna, Esteban, Salas, Luis, Sohn, Erika, Ruiz, Elfego, Nunez, Juan M, and Herrera, Joel. Deterministic convergence in iterative phase shifting. United States: N. p., 2009. Web. doi:10.1364/AO.48.001494.
Luna, Esteban, Salas, Luis, Sohn, Erika, Ruiz, Elfego, Nunez, Juan M, & Herrera, Joel. Deterministic convergence in iterative phase shifting. United States. https://doi.org/10.1364/AO.48.001494
Luna, Esteban, Salas, Luis, Sohn, Erika, Ruiz, Elfego, Nunez, Juan M, and Herrera, Joel. 2009. "Deterministic convergence in iterative phase shifting". United States. https://doi.org/10.1364/AO.48.001494.
@article{osti_21176033,
title = {Deterministic convergence in iterative phase shifting},
author = {Luna, Esteban and Salas, Luis and Sohn, Erika and Ruiz, Elfego and Nunez, Juan M and Herrera, Joel},
abstractNote = {Previous implementations of the iterative phase shifting method, in which the phase of a test object is computed from measurements using a phase shifting interferometer with unknown positions of the reference, do not provide an accurate way of knowing when convergence has been attained. We present a new approach to this method that allows us to deterministically identify convergence. The method is tested with a home-built Fizeau interferometer that measures optical surfaces polished to {lambda}/100 using the Hydra tool. The intrinsic quality of the measurements is better than 0.5 nm. Other possible applications for this technique include fringe projection or any problem where phase shifting is involved.},
doi = {10.1364/AO.48.001494},
url = {https://www.osti.gov/biblio/21176033}, journal = {Applied Optics},
issn = {0003-6935},
number = 8,
volume = 48,
place = {United States},
year = {Tue Mar 10 00:00:00 EDT 2009},
month = {Tue Mar 10 00:00:00 EDT 2009}
}