Optimization of the size ratio of Sn sphere and laser focal spot for an extreme ultraviolet light source

Journal Article · Mon Dec 01 00:00:00 EST 2008 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.3036956· OSTI ID:21175792

Yuspeh, S; Sequoia, K L; Tao, Y; Tillack, M S; Burdt, R; Najmabadi, F ^[1]

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1. Department of Electrical and Computer Engineering and the Center for Energy Research, University of California, San Diego, 9500 Gilman Drive, La Jolla, CA 92093-0438 (United States)

The effect of the ratio of Sn sphere diameter to laser focal spot size (SD/FSS) on conversion efficiency (CE) from laser to in-band (2%) 13.5 nm extreme ultraviolet (EUV) light was investigated by fixing the laser spot size and irradiating variable diameter spheres. It was found that a minimum SD/FSS, i.e., 2.5, is necessary to produce high in-band CE, which is 15% higher than planar targets. Two-dimensional plasma density profile maps showed that the density of the dominant in-band EUV emission region and the size of the surrounding absorbing plasma can be manipulated by geometric effects of the SD/FSS ratio.

• OSTI ID: 21175792
• Journal Information: Applied Physics Letters, Vol. 93, Issue 22; Other Information: DOI: 10.1063/1.3036956; (c) 2008 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
DENSITY
EXTREME ULTRAVIOLET RADIATION
LASERS
LIGHT SOURCES
OPTIMIZATION
PHOTON EMISSION
PLASMA
PLASMA DENSITY
PLASMA PRODUCTION
SPHERES
TIN
TWO-DIMENSIONAL CALCULATIONS
X-RAY SPECTRA