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Title: Structural, Optical and Electrical Properties of n-type GaN on Si (111) Grown by RF-plasma assisted Molecular Beam Epitaxy

Journal Article · · AIP Conference Proceedings
DOI:https://doi.org/10.1063/1.2940660· OSTI ID:21143313
; ;  [1]
  1. Nano-Optoelectronics Research and Tecnology Laboratory School of Physics, Universiti Sains Malaysia, 11800 Penang (Malaysia)

In this paper, we present the study of the structural, optical and electrical of n-type GaN grown on silicon (111) by RF plasma-assisted molecular beam epitaxy (RF-MBE). X-ray diffraction (XRD) measurement reveals that the GaN was epitaxially grown on silicon. For the photoluminescence (PL) measurement, a sharp and intense peak at 364.5 nm indicates that the sample is of high optical quality. Hall effect measurement shows that the film has a carrier concentration of 3.28x10{sup 19} cm{sup -3}. The surface of the n-type GaN was smooth and no any cracks and pits.

OSTI ID:
21143313
Journal Information:
AIP Conference Proceedings, Vol. 1017, Issue 1; Conference: PERFIK 2007: National physics conference 2007 on current issues of physics in Malaysia, Kuala Terengganu (Malaysia), 26-28 Dec 2007; Other Information: DOI: 10.1063/1.2940660; (c) 2008 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0094-243X
Country of Publication:
United States
Language:
English