Implantation conditions for diamond nanocrystal formation in amorphous silica

Journal Article · Fri Aug 01 00:00:00 EDT 2008 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.2968204· OSTI ID:21137434

Buljan, Maja; Radovic, Iva Bogdanovic; Desnica, Uros V; Ivanda, Mile; Jaksic, Milko ^[1]; Saguy, Cecile; Kalish, Rafi ^[2]; Djerdj, Igor ^[3]; Tonejc, Andelka ^[4]; Gamulin, Ozren ^[5]

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1. Ruder Boskovic Institute, P.O. Box 180, 10002 Zagreb (Croatia)
2. Physics Department and Solid State Institute, Technion, Haifa 32000 (Israel)
3. Department of Materials, Swiss Federal Institute of Technology (ETH) Zuerich, Wolfgang-Pauli-Str. 10, CH-8093 Zuerich (Switzerland)
4. Faculty of Science, Department of Physics, University of Zagreb, 10000 Zagreb (Croatia)
5. School of Medicine, Zagreb University, 10000 Zagreb (Croatia)

We present a study of carbon ion implantation in amorphous silica, which, followed by annealing in a hydrogen-rich environment, leads to preferential formation of carbon nanocrystals with cubic diamond (c-diamond), face-centered cubic (n-diamond), or simple cubic (i-carbon) carbon crystal lattices. Two different annealing treatments were used: furnace annealing for 1 h and rapid thermal annealing for a brief period, which enables monitoring of early nucleation events. The influence of implanted dose and annealing type on carbon and hydrogen concentrations, clustering, and bonding were investigated. Rutherford backscattering, elastic recoil detection analysis, infrared spectroscopy, transmission electron microscopy, selected area electron diffraction, ultraviolet-visible absorption measurements, and Raman spectroscopy were used to study these carbon formations. These results, combined with the results of previous investigations on similar systems, show that preferential formation of different carbon phases (diamond, n-diamond, or i-carbon) depends on implantation energy, implantation dose, and annealing conditions. Diamond nanocrystals formed at a relatively low carbon volume density are achieved by deeper implantation and/or lower implanted dose. Higher volume densities led to n-diamond and finally to i-carbon crystal formation. This observed behavior is related to damage sites induced by implantation. The optical properties of different carbon nanocrystal phases were significantly different.

• OSTI ID: 21137434
• Journal Information: Journal of Applied Physics, Vol. 104, Issue 3; Other Information: DOI: 10.1063/1.2968204; (c) 2008 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
ABSORPTION SPECTROSCOPY
ANNEALING
CARBON IONS
DIAMONDS
ELECTRON DIFFRACTION
FCC LATTICES
HYDROGEN
INFRARED SPECTRA
ION IMPLANTATION
NANOSTRUCTURES
NUCLEATION
PHASE TRANSFORMATIONS
RAMAN SPECTRA
RAMAN SPECTROSCOPY
RUTHERFORD BACKSCATTERING SPECTROSCOPY
SILICA
TRANSMISSION ELECTRON MICROSCOPY
ULTRAVIOLET RADIATION
ULTRAVIOLET SPECTRA
VISIBLE SPECTRA