Metrology And Standardization For Nanotechnologies

Journal Article · Thu Apr 10 00:00:00 EDT 2008 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.2918114· OSTI ID:21137057

Gavrilenko, V P; Novikov, Yu A; Rakov, A V; Todua, P A ^[1]

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1. Center for Surface and Vacuum Research, 40 Novatorov street, Moscow 119421 (Russian Federation)

Metrology and standardization have a crucial role in the development of nanotechnologies. First Russian standards for nanotechnologies are considered. These standards are based on the use of silicon test objects-measures of small length at the nanoscale level. Characteristics of these test objects are presented.

• OSTI ID: 21137057
• Journal Information: AIP Conference Proceedings, Vol. 999, Issue 1; Conference: EMMM-2007: International conference on electron microscopy and multiscale modeling, Moscow (Russian Federation), 3-7 Sep 2007; Other Information: DOI: 10.1063/1.2918114; (c) 2008 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0094-243X
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
ATOMIC FORCE MICROSCOPY
LENGTH
NANOSTRUCTURES
RUSSIAN FEDERATION
SCANNING ELECTRON MICROSCOPY
SILICON
STANDARDIZATION