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Title: Soft x-ray source for nanostructure imaging using femtosecond-laser-irradiated clusters

Journal Article · · Applied Physics Letters
DOI:https://doi.org/10.1063/1.2899966· OSTI ID:21120620
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  1. Kansai Photon Science Institute, Japan Atomic Energy Agency, 8-1 Umemidai, Kizugawa-city, Kyoto 619-0215 (Japan)

The intense soft x-ray light source using the supersonic expansion of the mixed gas of He and CO{sub 2}, when irradiated by a femtosecond Ti:sapphire laser pulse, is observed to enhance the radiation of soft x-rays from the CO{sub 2} clusters. Using this soft x-ray emissions, nanostructure images of 100-nm-thick Mo foils in a wide field of view (mm{sup 2} scale) with high spatial resolution (800 nm) are obtained with high dynamic range LiF crystal detectors. The local inhomogeneities of soft x-ray absorption by the nanometer-thick foils is measured with an accuracy of less than {+-}3%.

OSTI ID:
21120620
Journal Information:
Applied Physics Letters, Vol. 92, Issue 12; Other Information: DOI: 10.1063/1.2899966; (c) 2008 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
Country of Publication:
United States
Language:
English