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Title: A flexible curvilinear electromagnetic filter for direct current cathodic arc source

Abstract

Widespread applications of direct current (dc) cathodic arc deposition are hampered by macroparticle (MP) contamination, although a cathodic arc offers many unique merits such as high ionization rate, high deposition rate, etc. In this work, a flexible curvilinear electromagnetic filter is described to eliminate MPs from a dc cathodic arc source. The filter which has a relatively large size with a minor radius of about 85 mm is suitable for large cathodes. The filter is open and so the MPs do not rebound inside the filter. The flexible design allows the ions to be transported from the cathode to the sample surface optimally. Our measurements with a saturated ion current probe show that the efficiency of this flexible filter reaches about 2.0% (aluminum cathode) when the filter current is about 250 A. The MP density measured from TiN films deposited using this filter is two to three orders of magnitude less than that from films deposited with a 90 deg. duct magnetic filter and three to four orders of magnitude smaller than those deposited without a filter. Furthermore, our experiments reveal that the potential of the filter coil and the magnetic field on the surface of the cathode are twomore » important factors affecting the efficacy of the filter. Different biasing potentials can enhance the efficiency to up to 12-fold, and a magnetic field at about 4.0 mT can improve it by a factor of 2 compared to 5.4 mT.« less

Authors:
; ; ; ; ;  [1]
  1. School of Materials Science and Engineering, Shanghai Jiao Tong University, Shanghai 200240 (China)
Publication Date:
OSTI Identifier:
21024292
Resource Type:
Journal Article
Journal Name:
Review of Scientific Instruments
Additional Journal Information:
Journal Volume: 78; Journal Issue: 9; Other Information: DOI: 10.1063/1.2785846; (c) 2007 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 0034-6748
Country of Publication:
United States
Language:
English
Subject:
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; ALUMINIUM; CATHODES; CONTAMINATION; DEPOSITION; DESIGN; DIRECT CURRENT; EFFICIENCY; ELECTRIC ARCS; ELECTROMAGNETIC FILTERS; FILMS; IONS; MAGNETIC FIELDS; MAGNETIC FILTERS; PLASMA; POTENTIALS; PROBES; SURFACES; TITANIUM NITRIDES

Citation Formats

Hua, Dai, Yao, Shen, Liuhe, Li, Xiaoling, Li, Xun, Cai, Chu, Paul K, Department of 702, School of Mechanical Engineering and Automation, Beijing University of Aeronautics and Astronautics, Beijing 100083, China and Department of Physics and Materials Science, City University of Hong Kong, Tat Chee Avenue, Kowloon, Hong Kong, School of Materials Science and Engineering, Shanghai Jiao Tong University, Shanghai 200240, and Department of Physics and Materials Science, City University of Hong Kong, Tat Chee Avenue, Kowloon, Hong Kong. A flexible curvilinear electromagnetic filter for direct current cathodic arc source. United States: N. p., 2007. Web. doi:10.1063/1.2785846.
Hua, Dai, Yao, Shen, Liuhe, Li, Xiaoling, Li, Xun, Cai, Chu, Paul K, Department of 702, School of Mechanical Engineering and Automation, Beijing University of Aeronautics and Astronautics, Beijing 100083, China and Department of Physics and Materials Science, City University of Hong Kong, Tat Chee Avenue, Kowloon, Hong Kong, School of Materials Science and Engineering, Shanghai Jiao Tong University, Shanghai 200240, & Department of Physics and Materials Science, City University of Hong Kong, Tat Chee Avenue, Kowloon, Hong Kong. A flexible curvilinear electromagnetic filter for direct current cathodic arc source. United States. https://doi.org/10.1063/1.2785846
Hua, Dai, Yao, Shen, Liuhe, Li, Xiaoling, Li, Xun, Cai, Chu, Paul K, Department of 702, School of Mechanical Engineering and Automation, Beijing University of Aeronautics and Astronautics, Beijing 100083, China and Department of Physics and Materials Science, City University of Hong Kong, Tat Chee Avenue, Kowloon, Hong Kong, School of Materials Science and Engineering, Shanghai Jiao Tong University, Shanghai 200240, and Department of Physics and Materials Science, City University of Hong Kong, Tat Chee Avenue, Kowloon, Hong Kong. 2007. "A flexible curvilinear electromagnetic filter for direct current cathodic arc source". United States. https://doi.org/10.1063/1.2785846.
@article{osti_21024292,
title = {A flexible curvilinear electromagnetic filter for direct current cathodic arc source},
author = {Hua, Dai and Yao, Shen and Liuhe, Li and Xiaoling, Li and Xun, Cai and Chu, Paul K and Department of 702, School of Mechanical Engineering and Automation, Beijing University of Aeronautics and Astronautics, Beijing 100083, China and Department of Physics and Materials Science, City University of Hong Kong, Tat Chee Avenue, Kowloon, Hong Kong and School of Materials Science and Engineering, Shanghai Jiao Tong University, Shanghai 200240 and Department of Physics and Materials Science, City University of Hong Kong, Tat Chee Avenue, Kowloon, Hong Kong},
abstractNote = {Widespread applications of direct current (dc) cathodic arc deposition are hampered by macroparticle (MP) contamination, although a cathodic arc offers many unique merits such as high ionization rate, high deposition rate, etc. In this work, a flexible curvilinear electromagnetic filter is described to eliminate MPs from a dc cathodic arc source. The filter which has a relatively large size with a minor radius of about 85 mm is suitable for large cathodes. The filter is open and so the MPs do not rebound inside the filter. The flexible design allows the ions to be transported from the cathode to the sample surface optimally. Our measurements with a saturated ion current probe show that the efficiency of this flexible filter reaches about 2.0% (aluminum cathode) when the filter current is about 250 A. The MP density measured from TiN films deposited using this filter is two to three orders of magnitude less than that from films deposited with a 90 deg. duct magnetic filter and three to four orders of magnitude smaller than those deposited without a filter. Furthermore, our experiments reveal that the potential of the filter coil and the magnetic field on the surface of the cathode are two important factors affecting the efficacy of the filter. Different biasing potentials can enhance the efficiency to up to 12-fold, and a magnetic field at about 4.0 mT can improve it by a factor of 2 compared to 5.4 mT.},
doi = {10.1063/1.2785846},
url = {https://www.osti.gov/biblio/21024292}, journal = {Review of Scientific Instruments},
issn = {0034-6748},
number = 9,
volume = 78,
place = {United States},
year = {Sat Sep 15 00:00:00 EDT 2007},
month = {Sat Sep 15 00:00:00 EDT 2007}
}