A self-consistent hybrid model of a dual frequency sheath: Ion energy and angular distributions
- State Key Laboratory of Materials Modification by Laser, Electron, and Ion Beams, Department of Physics, Dalian University of Technology, Dalian 116023 (China)
This paper presents a self-consistent hybrid model including the fluid model which can describe the characteristics of collisional sheaths driven by dual radio-frequency (DF) sources and Monte Carlo (MC) method which can determine the ion energy and angular distributions incident onto the dual rf powered electrode. The charge-exchange collisions between ions and neutrals are included in the MC model in which a self-consistent instantaneous electric field obtained from the fluid model is adopted. In the simulation, the driven method we used is either the current-driven method or the voltage-driven method. In the current-driven method, the rf current sources are assumed to apply to an electrode, which is the so-called the equivalent circuit model and is used to self-consistently determine the relationship between the instantaneous sheath potential and the sheath thickness. In the voltage-driven method, however, the rf voltage sources are assumed to apply to an electrode. The dual rf sheath potential, sheath thickness, ion flux, ion energy distributions (IEDs), and ion angular distributions (IADs) are calculated for different parameters. The numerical solutions show that some external parameters such as the bias frequency and power of the lower-frequency source as well as gas pressure are crucial for determining the structure of collisional dual rf sheaths and the IEDs. The shapes of the IADs, however, are determined mainly by the gas pressure. Furthermore, it is found that the results from the different driven methods behave in the same way although there are some differences in some quantities.
- OSTI ID:
- 20960128
- Journal Information:
- Physics of Plasmas, Vol. 14, Issue 1; Other Information: DOI: 10.1063/1.2434250; (c) 2007 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 1070-664X
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
ANGULAR DISTRIBUTION
CALCIUM NITRIDES
CHARGE EXCHANGE
CURRENTS
ELECTRIC FIELDS
ELECTRIC POTENTIAL
ELECTRODES
ENERGY SPECTRA
EQUIVALENT CIRCUITS
IONS
MONTE CARLO METHOD
NUMERICAL SOLUTION
PLASMA
PLASMA PRESSURE
PLASMA SHEATH
PLASMA SIMULATION
RADIOWAVE RADIATION
THICKNESS