Infrared microthermography of microfabricated devices
- U.S. Naval Research Laboratory, Code 6365, Washington, District of Columbia 20375 (United States)
We report a new experimental apparatus for infrared microthermography applicable to a wide class of samples including semitransparent ones and perforated devices. This setup is particularly well suited for the thermography of microfabricated devices. Traditionally, temperature calibration is performed using calibration hot plates, but this is not applicable to transmissive samples. In this work a custom designed miniature calibration oven in conjunction with spatial filtering is used to obtain accurate static and transient temperature maps of actively heated devices. The procedure does not require prior knowledge of the emissivity. Calibration and image processing algorithms are discussed and analyzed. We show that relatively inexpensive uncooled bolometer arrays can be a suitable detector choice in certain radiometric applications. As an example, we apply this method in the analysis of temperature profiles of an actively heated microfabricated preconcentrator device that incorporates a perforated membrane and is used in trace detection of illicit substances.
- OSTI ID:
- 20953479
- Journal Information:
- Review of Scientific Instruments, Vol. 78, Issue 6; Other Information: DOI: 10.1063/1.2746573; (c) 2007 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0034-6748
- Country of Publication:
- United States
- Language:
- English
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