Laboratory arrangement for soft x-ray zone plate efficiency measurements
- Biomedical and X-Ray Physics, Department of Applied Physics, Royal Institute of Technology, AlbaNova, SE-106 91 Stockholm (Sweden)
We demonstrate a laboratory-scale arrangement for rapid and accurate measurements of the absolute and local efficiency of soft x-ray micro zone plates in the water window. This in-house instrument is based on a single-line {lambda}=2.88 nm liquid-jet laser-plasma source. Measurements are performed by a simultaneous comparison of first diffraction-order photon flux with the flux in a calibrated reference signal. This arrangement eliminates existing source emission fluctuations. The performance of the method is demonstrated by the result from measurements of two {approx}55 {mu}m diameter nickel micro zone plates, showing a groove efficiency of 12.9%{+-}1.1% and 11.7%{+-}1.0%. Furthermore, we show that spatially resolved efficiency mapping is an effective tool for a detailed characterization of local zone plate properties. Thus, this laboratory-scale instrument allows rapid feedback to the fabrication process which is important for future improvements.
- OSTI ID:
- 20953272
- Journal Information:
- Review of Scientific Instruments, Vol. 78, Issue 2; Other Information: DOI: 10.1063/1.2472590; (c) 2007 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0034-6748
- Country of Publication:
- United States
- Language:
- English
Similar Records
Soft x-ray microscopy using spiral zone plates
High-resolution Fresnel zone plates for soft x rays