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Title: Chromatic confocal spectral interferometry

Abstract

Chromatic confocal spectral interferomertry (CCSI) is a novel scheme for topography measurements that combines the techniques of spectral interferometry and chromatic confocal microscopy. This hybrid method allows for white-light interferometric detection with a high NA in a single-shot manner. To the best of our knowledge, CCSI is the first interferometric method that utilizes a confocally filtered and chromatically dispersed focus for detection and simultaneously allows for retrieval of the depth position of reflecting or scattering objects utilizing the phase (modulation frequency) of the interferometric signals acquired. With the chromatically dispersed focus, the depth range of the sensor is decoupled from the NA of the microscope objective.

Authors:
; ;
Publication Date:
OSTI Identifier:
20853785
Resource Type:
Journal Article
Journal Name:
Applied Optics
Additional Journal Information:
Journal Volume: 45; Journal Issue: 32; Other Information: DOI: 10.1364/AO.45.008244; (c) 2006 Optical Society of America; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 0003-6935
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; INTERFERENCE; INTERFEROMETRY; MICROSCOPES; MODULATION; OPTICAL MICROSCOPY; SCATTERING; TOPOGRAPHY; VISIBLE RADIATION

Citation Formats

Papastathopoulos, Evangelos, Koerner, Klaus, and Osten, Wolfgang. Chromatic confocal spectral interferometry. United States: N. p., 2006. Web. doi:10.1364/AO.45.008244.
Papastathopoulos, Evangelos, Koerner, Klaus, & Osten, Wolfgang. Chromatic confocal spectral interferometry. United States. https://doi.org/10.1364/AO.45.008244
Papastathopoulos, Evangelos, Koerner, Klaus, and Osten, Wolfgang. 2006. "Chromatic confocal spectral interferometry". United States. https://doi.org/10.1364/AO.45.008244.
@article{osti_20853785,
title = {Chromatic confocal spectral interferometry},
author = {Papastathopoulos, Evangelos and Koerner, Klaus and Osten, Wolfgang},
abstractNote = {Chromatic confocal spectral interferomertry (CCSI) is a novel scheme for topography measurements that combines the techniques of spectral interferometry and chromatic confocal microscopy. This hybrid method allows for white-light interferometric detection with a high NA in a single-shot manner. To the best of our knowledge, CCSI is the first interferometric method that utilizes a confocally filtered and chromatically dispersed focus for detection and simultaneously allows for retrieval of the depth position of reflecting or scattering objects utilizing the phase (modulation frequency) of the interferometric signals acquired. With the chromatically dispersed focus, the depth range of the sensor is decoupled from the NA of the microscope objective.},
doi = {10.1364/AO.45.008244},
url = {https://www.osti.gov/biblio/20853785}, journal = {Applied Optics},
issn = {0003-6935},
number = 32,
volume = 45,
place = {United States},
year = {Fri Nov 10 00:00:00 EST 2006},
month = {Fri Nov 10 00:00:00 EST 2006}
}