RF Power Coupling And Plasma Transport Effects In Magnetized Capacitive Discharges

Journal Article · Mon Sep 26 00:00:00 EDT 2005 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.2098528· OSTI ID:20726361

Ryan, P M; Carter, M D ^[1]; Hoffman, D J ^[2]

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1. Oak Ridge National Laboratory, Oak Ridge, TN (United States)
2. Applied Materials, Santa Clara, CA (United States)

Static magnetic fields have been used to expand the operational envelope, increase power efficiency, and control processing parameters in capacitively-coupled radio frequency plasma discharges. A simple physical model has been developed to investigate the roles of the plasma dielectric tensor and plasma transport in determining the ion flux spatial profile along a wafer surface over a range of plasma density, neutral pressure and magnetic field strength and orientation. The model has been incorporated into the MORRFIC code and calculations have been made for a capacitively-coupled 300-mm etch tool operating at frequencies greater than 100 MHz. A Lieberman sheath model show effects that can occur when the sheath voltages are made to be consistent with the driven RF fields in the collisional unmagnetized limit; other sheath models will also be considered. A two-dimensional transport model accounts for magnetized cross-field diffusion. Results isolate magnetic field effects that are caused by modification of the plasma dielectric from transport effects that are caused by the reduced electron mobility perpendicular to the magnetic field.

• OSTI ID: 20726361
• Journal Information: AIP Conference Proceedings, Vol. 787, Issue 1; Other Information: DOI: 10.1063/1.2098528; (c) 2005 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0094-243X
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
CONTROL
COUPLING
DIELECTRIC TENSOR
DIFFUSION
EFFICIENCY
ELECTRIC POTENTIAL
ELECTRON MOBILITY
HIGH-FREQUENCY DISCHARGES
IONS
M CODES
MAGNETIC FIELDS
MHZ RANGE
ORIENTATION
PLASMA
PLASMA DENSITY
PLASMA PRODUCTION
RADIOWAVE RADIATION
TRANSPORT THEORY
TWO-DIMENSIONAL CALCULATIONS