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Title: In-line sensor for accurate rf power measurements

Journal Article · · Review of Scientific Instruments
DOI:https://doi.org/10.1063/1.2090287· OSTI ID:20723187
;  [1]
  1. National Centre of Plasma Science and Technology, Dublin City University (Ireland)

An in-line sensor has been constructed with 50 {omega} characteristic impedance to accurately measure rf power dissipated in a matched or unmatched load with a view to being implemented as a rf discharge diagnostic. The physical construction and calibration technique are presented. The design is a wide band, hybrid directional coupler/current-voltage sensor suitable for fundamental and harmonic power measurements. A comparison with a standard wattmeter using dummy load impedances shows that this in-line sensor is significantly more accurate in mismatched conditions.

OSTI ID:
20723187
Journal Information:
Review of Scientific Instruments, Vol. 76, Issue 10; Other Information: DOI: 10.1063/1.2090287; (c) 2005 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0034-6748
Country of Publication:
United States
Language:
English