DCEMS Study of Thin Stainless Steel Films Deposited by RF Sputtering of AISI316L
Abstract
Thin stainless steel films were prepared on SiO2/Si plate heated at 100 deg. C and 400 deg. C using AISI316L as target, by a RF magnetron Ar sputtering method. RF sputtered-deposited films and the oxidized surface layers by post heating were characterized by depth selective conversion electron Moessbauer spectroscopy (DCEMS) using a He+5%CH4 gas proportional counter. The as-deposited films consisted of magnetic phases, the magnetic orientation of which had a tendency to be perpendicular to the surface of the film. In the case of the deposited films at substrate temperature of 100 deg. C, a small amount of Fe2O3 and ferritic stainless steel formed by post-heating in air. A magnetic subcomponent and a austenite phase were formed in the films deposited at substrate temperature of 400 deg. C. {alpha}-Fe2O3 and magnetite formed easily on the top and middle layers of the films by post-heating in air. The oxide states of the films deposited at different temperatures of substrate were clearly distinguished by post-heating. Thus it was found by DCEMS that the structures of the deposited films were strongly affected by the preparation method and the temperature of the substrate.
- Authors:
-
- School of Engineering, University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-8656 (Japan)
- Publication Date:
- OSTI Identifier:
- 20722124
- Resource Type:
- Journal Article
- Journal Name:
- AIP Conference Proceedings
- Additional Journal Information:
- Journal Volume: 765; Journal Issue: 1; Conference: International symposium on the industrial applications of the Moessbauer effect, Madrid (Spain), 4-8 Oct 2004; Other Information: DOI: 10.1063/1.1923642; (c) 2005 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 0094-243X
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; AIR; ANNEALING; AUSTENITE; DEPOSITION; ELECTRON SPECTROSCOPY; FERRITIC STEELS; HELIUM; IRON OXIDES; MAGNETITE; METHANE; MOESSBAUER EFFECT; PROPORTIONAL COUNTERS; SPUTTERING; STAINLESS STEELS; SUBSTRATES; SURFACES; TEMPERATURE DEPENDENCE; TEMPERATURE RANGE 0273-0400 K; TEMPERATURE RANGE 0400-1000 K; THIN FILMS
Citation Formats
Nomura, K, Iio, S, Ujihira, Y, and Terai, T. DCEMS Study of Thin Stainless Steel Films Deposited by RF Sputtering of AISI316L. United States: N. p., 2005.
Web. doi:10.1063/1.1923642.
Nomura, K, Iio, S, Ujihira, Y, & Terai, T. DCEMS Study of Thin Stainless Steel Films Deposited by RF Sputtering of AISI316L. United States. https://doi.org/10.1063/1.1923642
Nomura, K, Iio, S, Ujihira, Y, and Terai, T. 2005.
"DCEMS Study of Thin Stainless Steel Films Deposited by RF Sputtering of AISI316L". United States. https://doi.org/10.1063/1.1923642.
@article{osti_20722124,
title = {DCEMS Study of Thin Stainless Steel Films Deposited by RF Sputtering of AISI316L},
author = {Nomura, K and Iio, S and Ujihira, Y and Terai, T},
abstractNote = {Thin stainless steel films were prepared on SiO2/Si plate heated at 100 deg. C and 400 deg. C using AISI316L as target, by a RF magnetron Ar sputtering method. RF sputtered-deposited films and the oxidized surface layers by post heating were characterized by depth selective conversion electron Moessbauer spectroscopy (DCEMS) using a He+5%CH4 gas proportional counter. The as-deposited films consisted of magnetic phases, the magnetic orientation of which had a tendency to be perpendicular to the surface of the film. In the case of the deposited films at substrate temperature of 100 deg. C, a small amount of Fe2O3 and ferritic stainless steel formed by post-heating in air. A magnetic subcomponent and a austenite phase were formed in the films deposited at substrate temperature of 400 deg. C. {alpha}-Fe2O3 and magnetite formed easily on the top and middle layers of the films by post-heating in air. The oxide states of the films deposited at different temperatures of substrate were clearly distinguished by post-heating. Thus it was found by DCEMS that the structures of the deposited films were strongly affected by the preparation method and the temperature of the substrate.},
doi = {10.1063/1.1923642},
url = {https://www.osti.gov/biblio/20722124},
journal = {AIP Conference Proceedings},
issn = {0094-243X},
number = 1,
volume = 765,
place = {United States},
year = {Tue Apr 26 00:00:00 EDT 2005},
month = {Tue Apr 26 00:00:00 EDT 2005}
}