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Title: Compact extreme ultraviolet reflectometer for the characterization of grazing incidence optics based on a gas discharge light source

A grazing incidence reflectometer operating in the extreme ultraviolet (EUV) spectral range around 13.5 nm is presented which is making use of a compact xenon pinch plasma light source. The apparatus allows for measuring the absolute reflectivity of a sample for grazing incidence angle in the range from typically 5 deg. to 35 deg. by comparing the EUV diode signal for the reflected light and a reference diode with an accuracy of better than 2%. Design criteria for proper matching of diode apertures and distances with respect to the spatially extended plasma source are presented. The absolute accuracy has been checked by investigating a ruthenium sample with low roughness, which has a reflectivity in the EUV close to the theoretical limit. Comparison to measurements at the EUV-reflectometer of the Physikalisch Technische Bundesanstalt in Berlin at a synchrotron source confirm the absolute accuracy of better than 2% for the reflectivity for the angle interval of interest.
Authors:
; ;  [1] ;  [2]
  1. Fraunhofer Institute for Laser Technology, Steinbachstrasse 15, D-52074 Aachen (Germany)
  2. (Germany)
Publication Date:
OSTI Identifier:
20646463
Resource Type:
Journal Article
Resource Relation:
Journal Name: Review of Scientific Instruments; Journal Volume: 76; Journal Issue: 4; Other Information: DOI: 10.1063/1.1884387; (c) 2005 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY; ACCURACY; APERTURES; EXTREME ULTRAVIOLET RADIATION; GRAZING; INCIDENCE ANGLE; LIGHT BULBS; LIGHT SOURCES; OPTICS; PLASMA; REFLECTIVITY; ROUGHNESS; RUTHENIUM; SYNCHROTRON RADIATION SOURCES; XENON