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Title: High-frequency surface acoustic wave device based on thin-film piezoelectric interdigital transducers

Using high-quality epitaxial c-axis Pb(Zr{sub 0.2}Ti{sub 0.8})O{sub 3} films grown by off-axis magnetron sputtering onto metallic (001) Nb-doped SrTiO{sub 3} substrates, a nonconventional thin-film surface acoustic wave device based on periodic piezoelectric transducers was realized. The piezoelectric transducers consist of a series of ferroelectric domains with alternating polarization states. The artificial modification of the ferroelectric domain structure is performed by using an atomic force microscope tip as a source of electric field, allowing local switching of the polarization. Devices with 1.2 and 0.8 {mu}m wavelength, defined by the modulation period of the polarization, and corresponding to central frequencies in the range 1.50-3.50 GHz have been realized and tested.
Authors:
; ; ; ; ; ; ;  [1] ;  [2] ;  [3] ;  [4]
  1. DPMC, University of Geneva, 24 Quai E. Ansermet, 1211 Geneva 4 (Switzerland)
  2. (France)
  3. (Italy)
  4. (Norway)
Publication Date:
OSTI Identifier:
20632775
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 85; Journal Issue: 10; Other Information: DOI: 10.1063/1.1787897; (c) 2004 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; ATOMIC FORCE MICROSCOPY; DEPOSITION; DOMAIN STRUCTURE; DOPED MATERIALS; ELECTRIC FIELDS; EPITAXY; FERROELECTRIC MATERIALS; GHZ RANGE 01-100; LEAD COMPOUNDS; MAGNETRONS; MODULATION; PERIODICITY; PIEZOELECTRICITY; POLARIZATION; SOUND WAVES; SPUTTERING; STRONTIUM TITANATES; THIN FILMS; TRANSDUCERS; ZIRCONIUM COMPOUNDS