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Title: Process control of large-scale finite element simulation software

We have developed a methodology for coupling large-scale numerical codes with process control algorithms. Closed-loop simulations were demonstrated using the Sandia-developed finite element thermal code TACO and the commercially available finite element thermal-mechanical code ABAQUS. This new capability enables us to use computational simulations for designing and prototyping advanced process-control systems. By testing control algorithms on simulators before building and testing hardware, enormous time and cost savings can be realized. The need for a closed-loop simulation capability was demonstrated in a detailed design study of a rapid-thermal-processing reactor under development by CVC Products Inc. Using a thermal model of the RTP system as a surrogate for the actual hardware, we were able to generate response data needed for controller design. We then evaluated the performance of both the controller design and the hardware design by using the controller to drive the finite element model. The controlled simulations provided data on wafer temperature uniformity as a function of ramp rate, temperature sensor locations, and controller gain. This information, which is critical to reactor design, cannot be obtained from typical open-loop simulations.
Authors:
; ; ; ;
Publication Date:
OSTI Identifier:
205962
Report Number(s):
SAND--96-8214
ON: DE96006553
DOE Contract Number:
AC04-94AL85000
Resource Type:
Technical Report
Resource Relation:
Other Information: PBD: Feb 1996
Research Org:
Sandia National Labs., Livermore, CA (United States)
Sponsoring Org:
USDOE, Washington, DC (United States)
Country of Publication:
United States
Language:
English
Subject:
32 ENERGY CONSERVATION, CONSUMPTION, AND UTILIZATION; 99 MATHEMATICS, COMPUTERS, INFORMATION SCIENCE, MANAGEMENT, LAW, MISCELLANEOUS; COMPUTER-AIDED MANUFACTURING; MACHINERY; SERVOMECHANISMS; THERMOCHEMICAL PROCESSES; EQUATIONS; COMPUTER CODES