Capacitively coupled RF diamond-like-carbon reactor
A process of coating a non-conductive fiber with diamond-like carbon, including passing a non-conductive fiber between a pair of parallel metal grids within a reaction chamber, introducing a hydrocarbon gas into the reaction chamber, forming a plasma within the reaction chamber for a sufficient period of time whereby diamond-like carbon is formed upon the non-conductive fiber, is provided together with a reactor chamber for deposition of diamond-like carbon upon a non-conductive fiber, including a vacuum chamber, a cathode assembly including a pair of electrically isolated opposingly parallel metal grids spaced apart at a distance of less than about 1 centimeter, an anode, a means of introducing a hydrocarbon gas into said vacuum chamber, and a means of generating a plasma within said vacuum chamber.
- Research Organization:
- Los Alamos National Laboratory (LANL), Los Alamos, NM (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- W-7405-ENG-36
- Assignee:
- LANL; EDB-00:014219
- Application Number:
- Int. Cl. D06M 1174; C23C 16/00; B05D 3/06; US 6,037,016/A/; 9-077,513; TRN: IM200016%%183
- OSTI ID:
- 20015700
- Resource Relation:
- Other Information: PBD: 14 Mar 2000
- Country of Publication:
- United States
- Language:
- English
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