Determination of ionic and neutral components of argon-methyl methacrylate radiofrequency discharge plasma by mass spectrometry
- Institute of Energy Problems of Chemical Physics, Moscow (Russian Federation)
Positive ions and neutral species formed in the plasma of a radiofrequency discharge in an argonmethyl methacrylate (MMA) mixture at 5.28 MHz, discharge power 12 - 130 W, pressure 10 - 100 Pa, and 0.5 - 10% MMA content of the gas mixture were investigated by mass spectrometry. Over 30 different ionic species were identified in the plasma under various experimental conditions. The most abundant plasma ions were as follows (the m/e values are given in parentheses): CH{sub 3}{sup +} (15), C{sub 2}H{sub 2}{sup +} (26), C{sub 2}H{sub 3}{sup +} (27), C{sub 2}H{sub 4}{sup +}, CO{sup +} (28), C{sub 2}H{sub 5}{sup +}, C{sub 2}H{sub 5}{sup +}, HCO{sup +} (29), C{sub 3}H{sub 3}{sup +} (39), Ar{sup +} (40), C{sub 3}H{sub 5}{sup +} (41), COOCH{sub 3}{sup +} (101). At the MMA concentrations studied, Ar{sup +} was the principal ionic component of the plasma. Among the neutral plasma components, 28 compounds were identified, including C{sub 1}-C{sub 6} hydrocarbons, H{sub 2},H{sub 2}O, CO, HCOH, CH{sub 3}OH, CO{sub 2}, CH{sub 3}COCH{sub 3}, and C{sub 3}H{sub 7}COH. The experimental data suggest that both electron-impact-induced dissociation and ion-molecule reactions involving Ar{sup +}MMA mixture.
- OSTI ID:
- 166703
- Journal Information:
- High Energy Chemistry, Vol. 29, Issue 5; Other Information: PBD: Sep-Oct 1995; TN: Translated from Khimiya Vysokikh Energii; 29: No. 5, 377-381(1995)
- Country of Publication:
- United States
- Language:
- English
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