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Title: ACTINIC MASK INSPECTION AT THE ALS: RISK REDUCTION ACTIVITIES FOR 2003

This document reports on risk reduction activities performed at the VNL during CY2003 as a part of the Lith-343 actinic inspection project funded by International SEMATECH. The risk reduction activities described in this document comprise deliverable items 3.1.3, 3.1.4, 3.1.5 and 3.1.6 of Amendment 6 to the VNL EUV mask blank technology transfer contract.
Authors:
; ; ; ; ;
Publication Date:
OSTI Identifier:
15013831
Report Number(s):
UCRL-SR-201686
TRN: US200803%%858
DOE Contract Number:
W-7405-ENG-48
Resource Type:
Technical Report
Research Org:
Lawrence Livermore National Laboratory (LLNL), Livermore, CA
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUMM MECHANICS, GENERAL PHYSICS; TECHNOLOGY TRANSFER; SAFETY; LAWRENCE LIVERMORE NATIONAL LABORATORY