ACTINIC MASK INSPECTION AT THE ALS: RISK REDUCTION ACTIVITIES FOR 2003
This document reports on risk reduction activities performed at the VNL during CY2003 as a part of the Lith-343 actinic inspection project funded by International SEMATECH. The risk reduction activities described in this document comprise deliverable items 3.1.3, 3.1.4, 3.1.5 and 3.1.6 of Amendment 6 to the VNL EUV mask blank technology transfer contract.
- Publication Date:
- OSTI Identifier:
- Report Number(s):
- DOE Contract Number:
- Resource Type:
- Technical Report
- Research Org:
- Lawrence Livermore National Laboratory (LLNL), Livermore, CA
- Sponsoring Org:
- Country of Publication:
- United States
- 71 CLASSICAL AND QUANTUMM MECHANICS, GENERAL PHYSICS; TECHNOLOGY TRANSFER; SAFETY; LAWRENCE LIVERMORE NATIONAL LABORATORY
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