skip to main content

Title: Physical Properties of HWCVD Microcrystalline Silicon Thin Films: Preprint

This conference paper describes Microcrystalline silicon films were grown with different thicknesses and different hydrogen dilution ratios on glass and Si substrates. Some films were deposited with a seed layer, whereas others were deposited directly on the substrate. We used atomic force microscopy, scanning electron microscopy, and X-ray diffraction to study the morphology and crystalline structure of the samples. We did not find a significant influence of the different substrates on the morphology or crystalline structure. The presence of the seed layer enhanced the crystallization process, decreasing the amount of amorphous layer present in the films. The microstructure of most films was formed by grains, with a subgrain structure. Films grown with low values of dilution ratio had (220) texture and elongated grains, whereas films deposited with high values of dilution ratio were randomly oriented and had an irregular shape.
Authors:
; ; ; ; ; ; ;
Publication Date:
OSTI Identifier:
15006967
Report Number(s):
NREL/CP-520-31428
TRN: US200412%%536
DOE Contract Number:
AC36-99-GO10337
Resource Type:
Conference
Resource Relation:
Conference: Conference title not supplied, Conference location not supplied, Conference dates not supplied; Other Information: PBD: 1 May 2002; Related Information: Prepared for the 29th IEEE PV Specialists Conference, 20-24 May
Research Org:
National Renewable Energy Lab., Golden, CO (US)
Sponsoring Org:
US Department of Energy (US)
Country of Publication:
United States
Language:
English
Subject:
08 HYDROGEN; 14 SOLAR ENERGY; 36 MATERIALS SCIENCE; ATOMIC FORCE MICROSCOPY; CRYSTALLIZATION; DILUTION; HYDROGEN; MICROSTRUCTURE; MORPHOLOGY; PHYSICAL PROPERTIES; SCANNING ELECTRON MICROSCOPY; SILICON; SUBSTRATES; TEXTURE; THIN FILMS; X-RAY DIFFRACTION PV; SCANNING ELECTRON MICROSCOPY (SEM); ATOMIC FORCE MICROSCOPY; X-RAY DIFFRACTION; RAMAN SPECTROSCOPY; GLASS SUBSTRATES; SOLAR ENERGY - PHOTOVOLTAICS; AMORPHOUS SILICON; SI BASED MATERIALS (NOT DEVICES): MICROCRYSTALLINE; MATERIAL PROPERTIES: STRUCTURAL, VIBRATIONAL,& ELASTIC