Physical Properties of HWCVD Microcrystalline Silicon Thin Films: Preprint
This conference paper describes Microcrystalline silicon films were grown with different thicknesses and different hydrogen dilution ratios on glass and Si substrates. Some films were deposited with a seed layer, whereas others were deposited directly on the substrate. We used atomic force microscopy, scanning electron microscopy, and X-ray diffraction to study the morphology and crystalline structure of the samples. We did not find a significant influence of the different substrates on the morphology or crystalline structure. The presence of the seed layer enhanced the crystallization process, decreasing the amount of amorphous layer present in the films. The microstructure of most films was formed by grains, with a subgrain structure. Films grown with low values of dilution ratio had (220) texture and elongated grains, whereas films deposited with high values of dilution ratio were randomly oriented and had an irregular shape.
- Research Organization:
- National Renewable Energy Lab. (NREL), Golden, CO (United States)
- Sponsoring Organization:
- US Department of Energy (US)
- DOE Contract Number:
- AC36-99-GO10337
- OSTI ID:
- 15006967
- Report Number(s):
- NREL/CP-520-31428; TRN: US200412%%536
- Resource Relation:
- Conference: Conference title not supplied, Conference location not supplied, Conference dates not supplied; Other Information: PBD: 1 May 2002; Related Information: Prepared for the 29th IEEE PV Specialists Conference, 20-24 May
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
14 SOLAR ENERGY
36 MATERIALS SCIENCE
ATOMIC FORCE MICROSCOPY
CRYSTALLIZATION
DILUTION
HYDROGEN
MICROSTRUCTURE
MORPHOLOGY
PHYSICAL PROPERTIES
SCANNING ELECTRON MICROSCOPY
SILICON
SUBSTRATES
TEXTURE
THIN FILMS
X-RAY DIFFRACTION
PV
SCANNING ELECTRON MICROSCOPY (SEM)
RAMAN SPECTROSCOPY
GLASS SUBSTRATES
SOLAR ENERGY - PHOTOVOLTAICS
AMORPHOUS SILICON
SI BASED MATERIALS (NOT DEVICES): MICROCRYSTALLINE
MATERIAL PROPERTIES: STRUCTURAL
VIBRATIONAL
& ELASTIC