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Title: Analytical Formulae for Calculation of X-Ray Detector Solid Angles in the Scanning and Scanning/Transmission Analytical Electron Microscope

Journal Article · · Microscopy and Microanalysis

Closed form analytical equations used to calculate the collection solid angle of six common geometries of solid-state X-ray detectors in scanning and scanning/transmission analytical electron microscopy are presented. Using these formulae one can make realistic comparisons of the merits of the different detector geometries in modern electron column instruments. This work updates earlier formulations and adds new detector configurations.

Research Organization:
Argonne National Lab. (ANL), Argonne, IL (United States)
Sponsoring Organization:
USDOE Office of Science - Office of Basic Energy Sciences - Scientific User Facilities Division
DOE Contract Number:
AC02-06CH11357
OSTI ID:
1392491
Journal Information:
Microscopy and Microanalysis, Vol. 20, Issue 04; ISSN 1431-9276
Publisher:
Microscopy Society of America (MSA)
Country of Publication:
United States
Language:
English

References (3)

An integrated Silicon Drift Detector System for FEI Schottky Field Emission Transmission Electron Microscopes journal July 2009
Detector Solid Angle Formulas for Use in X-Ray Energy Dispersive Spectrometry journal March 2009
Characterization of an analytical electron microscope with a NiO test specimen journal July 1994

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