Field emission properties of ultrasmall Zr spots on W

Journal Article · Mon May 01 00:00:00 EDT 1995 · Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena

DOI:https://doi.org/10.1116/1.587900· OSTI ID:136148

Fursey, G N; Glazanov, D V ^[1]

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1. St. Petersburg Bonch-Bruevitsch State Univ. of Telecommunications (Russian Federation)

The aims of the investigation were to obtain small and supersmall Zr/ZrO spots on W surface, estimating the limit emission capabilities of such systems, and to analyze their physical mechanisms, which determine their stability. Ultrasmall Zr spots with radii of {approximately} 100 {Angstrom} were obtained. For such spots field emission current densities of {approximately} 10{sup 9} A/cm{sup 2} were achieved in stationary regime. The numerical simulation of the emitter heating in the three-dimensional axial-symmetrical model showed good qualitative agreement with the experimental results for both localized and nonlocalized emission. 25 refs., 6 figs.

• OSTI ID: 136148
• Journal Information: Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena, Vol. 13, Issue 3; Other Information: PBD: May-Jun 1995
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
66 PHYSICS
ZIRCONIUM
FIELD EMISSION
ZIRCONIUM OXIDES
TUNGSTEN
CURRENT DENSITY
ELECTRON SOURCES
THERMODYNAMICS