A High-Speed Large-Range Tip-Tilt-Piston Micromirror Array

Journal Article · Thu Dec 01 00:00:00 EST 2016 · Journal of Microelectromechanical Systems

DOI:https://doi.org/10.1109/JMEMS.2016.2628723· OSTI ID:1349012

Hopkins, Jonathan B.  ^[1]; Panas, Robert M. ^[2]; Song, Yuanping ^[1]; White, Carolyn D. ^[3]

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1. Univ. of California, Los Angeles, CA (United States)
2. Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
3. AM Fitzgerald & Associates, LLC, Burlingame, CA (United States)

This work introduces the design of a high fill-factor (>99%) micromirror array (MMA) that consists of 1mm2 hexagonal mirrors, which are expected to each independently achieve continuous, closed-loop control of three degrees of freedom (DOFs)—tip, tilt, and piston—over large ranges (>±10o rotation and >±30μm translation) at high speeds (~45kHz for a 1o amplitude of rotational oscillation). The flexure topology of this array is designed using the Freedom, Actuation, and Constraint Topologies (FACT) synthesis approach, which utilizes geometric shapes to help designers rapidly consider every flexure topology that best achieves a desired set of DOFs driven by decoupled actuators. The geometry of this array’s comb-drive actuators are optimized in conjunction with the geometry of the system’s flexures using a novel approach. The analytical models underlying this approach are verified using finite element analysis (FEA) and validated using experimental data. The capabilities of this new mirror array will enable, or significantly improve, the performance of a variety of high-impact optical technologies such as advanced optical switches, spatial-light modulators, displays, and laser steering or scanning devices.

• Research Organization: Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
• Sponsoring Organization: USDOE
• Grant/Contract Number: AC52-07NA27344
• OSTI ID: 1349012
• Report Number(s): LLNL-JRNL-702806
• Journal Information: Journal of Microelectromechanical Systems, Vol. 26, Issue 1; ISSN 1057-7157
• Publisher: IEEE
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS