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Title: Controlling X-ray deformable mirrors during inspection

Journal Article · · Journal of Synchrotron Radiation (Online)
 [1];  [2];  [1]
  1. Brookhaven National Lab. (BNL), Upton, NY (United States). NSLS-II
  2. Brookhaven National Lab. (BNL), Upton, NY (United States). NSLS-II; Sichuan Univ., Chengdu (China)

The X-ray deformable mirror (XDM) is becoming widely used in the present synchrotron/free-electron laser facilities because of its flexibility in correcting wavefront errors or modification of the beam size at the sample location. Owing to coupling among the N actuators of an XDM, (N + 1) or (2N + 1) scans are required to learn the response of each actuator one by one. When the mirror has an important number of actuators (N) and the actuator response time including stabilization or the necessary metrology time is long, the learning process can be time consuming. In this paper, a fast and accurate method is presented to drive an XDM to a target shape usually with only three or four measurements during inspection. The metrology data are used as feedback to calculate the curvature discrepancy between the current and the target shapes. Three different derivative estimation methods are introduced to calculate the curvature from measured data. The mirror shape is becoming close to the target through iterative compensations. Finally, the feasibility of this simple and effective approach is demonstrated by a series of experiments.

Research Organization:
Brookhaven National Laboratory (BNL), Upton, NY (United States)
Sponsoring Organization:
USDOE Office of Science (SC), Basic Energy Sciences (BES)
Contributing Organization:
Sichuan Univ., Chengdu (China)
Grant/Contract Number:
AC02-98CH10886
OSTI ID:
1341652
Report Number(s):
BNL-113376-2016-JA; TRN: US1701519
Journal Information:
Journal of Synchrotron Radiation (Online), Vol. 23, Issue 6; ISSN 1600-5775
Publisher:
International Union of CrystallographyCopyright Statement
Country of Publication:
United States
Language:
English
Citation Metrics:
Cited by: 5 works
Citation information provided by
Web of Science

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Cited By (3)

Deflectometry encoding the measured angle in a time-dependent intensity signal journal February 2019
A piezoelectric deformable X-ray mirror for phase compensation based on global optimization journal April 2019
Repeatability analysis of one-dimensional angular-measurement-based stitching interferometry journal January 2018