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Title: Modification of SRIM-calculated dose and injected ion profiles due to sputtering, injected ion buildup and void swelling

Journal Article · · Nuclear Instruments and Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms

In radiation effects on materials utilizing self-ion irradiations, it is necessary to calculate the local displacement damage level and ion injection profile because of the short distance that self-ions travel in a material and because of the strong variation of displacement rate with depth in a specimen. The most frequently used tool for this is the software package called Stopping and Range of Ions in Matter (SRIM). A SRIM-calculated depth-dependent dose level is usually determined under the implicit assumption that the target does not undergo any significant changes in volume during the process, in particular SRIM ignores the effect of sputtering, injected ions, and void swelling on the redistribution of the dose and injected atom profiles. This approach become increasingly invalid as the ion fluence reaches ever higher levels, especially for low energy ion irradiations. The original surface is not maintained due to sputter-induced erosion, while within the irradiated region of the specimen, injected ions are adding material, and if void swelling is occurring, it is creating empty space. An iterative mathematical treatment of SRIM outputs to produce corrected dose and injected atom profiles is presented along with examples differences between SRIM-calculated values and corrected values over a range of typical ion energies.

Research Organization:
Pacific Northwest National Lab. (PNNL), Richland, WA (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
AC05-76RL01830
OSTI ID:
1339876
Report Number(s):
PNNL-SA-119227; AF5810000
Journal Information:
Nuclear Instruments and Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms, Vol. 387, Issue C; ISSN 0168-583X
Publisher:
Elsevier
Country of Publication:
United States
Language:
English

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