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Title: Lithographically defined microporous carbon-composite structures

Patent ·
OSTI ID:1334643

A microporous carbon scaffold is produced by lithographically patterning a carbon-containing photoresist, followed by pyrolysis of the developed resist structure. Prior to exposure, the photoresist is loaded with a nanoparticulate material. After pyrolysis, the nanonparticulate material is dispersed in, and intimately mixed with, the carbonaceous material of the scaffold, thereby yielding a carbon composite structure.

Research Organization:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
AC04-94AL85000
Assignee:
Sandia Corporation (Albuquerque, NM)
Patent Number(s):
9,513,554
Application Number:
14/749,328
OSTI ID:
1334643
Resource Relation:
Patent File Date: 2015 Jun 24
Country of Publication:
United States
Language:
English

References (3)

Planar inorganic device patent June 2007
Lithographically defined microporous carbon structures patent January 2013
Tunable Young's Modulus in Carbon MEMS Using Graphene-Based Stiffeners journal March 2013

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