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This content will become publicly available on November 21, 2017

Title: Si:SrTiO 3 -Al 2 O 3 -Si:SrTiO 3 multi-dielectric architecture for metal-insulator-metal capacitor applications

Authors:
ORCiD logo ; ORCiD logo ; ORCiD logo ;
Publication Date:
OSTI Identifier:
1333015
Grant/Contract Number:
FG02-08ER46526
Type:
Publisher's Accepted Manuscript
Journal Name:
Applied Physics Letters
Additional Journal Information:
Journal Volume: 109; Journal Issue: 21; Related Information: CHORUS Timestamp: 2016-12-27 21:11:48; Journal ID: ISSN 0003-6951
Publisher:
American Institute of Physics
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English