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This content will become publicly available on November 3, 2017

Title: Pattern-generation and pattern-transfer for single-digit nano devices

Authors:
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Publication Date:
OSTI Identifier:
1332011
Type:
Publisher's Accepted Manuscript
Journal Name:
Journal of Vacuum Science and Technology. B, Nanotechnology and Microelectronics
Additional Journal Information:
Journal Volume: 34; Journal Issue: 6; Related Information: CHORUS Timestamp: 2016-12-28 19:20:12; Journal ID: ISSN 2166-2746
Publisher:
American Vacuum Society
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English