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Title: Analysis of a planetary-rotation system for evaporated optical coatings

The impact of planetary-design considerations for optical coating deposition is analyzed, including the ideal number of planets, variations in system performance, and the deviation of planet motion from the ideal. System capacity is maximized for four planets, although substrate size can significantly influence this result. Guidance is provided in the design of high-performance deposition systems based on the relative impact of different error modes. As a result, errors in planet mounting such that the planet surface is not perpendicular to its axis of rotation are particularly problematic, suggesting planetary design modifications would be appropriate.
  1. Univ. of Rochester, Rochester, NY (United States)
Publication Date:
OSTI Identifier:
Grant/Contract Number:
Accepted Manuscript
Journal Name:
Applied Optics
Additional Journal Information:
Journal Volume: 55; Journal Issue: 30; Journal ID: ISSN 0003-6935
Optical Society of America (OSA)
Research Org:
Univ. of Rochester, Rochester, NY (United States)
Sponsoring Org:
USDOE National Nuclear Security Administration (NNSA)
Country of Publication:
United States
36 MATERIALS SCIENCE; deposition and fabrication; materials and process characterization