skip to main content

Title: Mapping of Threading Screw Dislocations in 4H n-Type SiC Wafers

Authors:
; ; ; ; ; ; ; ;
Publication Date:
OSTI Identifier:
1328040
Resource Type:
Journal Article
Resource Relation:
Journal Name: Materials Science Forum (Online); Journal Volume: 858; Journal Issue: 05, 2016
Publisher:
Trans Tech Publications
Research Org:
Advanced Photon Source (APS), Argonne National Laboratory (ANL), Argonne, IL (US)
Sponsoring Org:
DOE - BASIC ENERGY SCIENCES
Country of Publication:
United States
Language:
ENGLISH