skip to main content

Title: Study of Defect Structures in 6H-SiC a/m-Plane Pseudofiber Crystals Grown by Hot-Wall CVD Epitaxy

Authors:
; ; ; ; ; ; ; ; ;
Publication Date:
OSTI Identifier:
1328032
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Electronic Materials; Journal Volume: 45; Journal Issue: 4
Publisher:
Springer
Research Org:
Advanced Photon Source (APS), Argonne National Laboratory (ANL), Argonne, IL (US)
Sponsoring Org:
DOE - BASIC ENERGY SCIENCESNASA
Country of Publication:
United States
Language:
ENGLISH