Three-dimensional nanostructure determination from a large diffraction data set recorded using scanning electron nanodiffraction

Meng, Yifei; Zuo, Jian-Min

doi:10.1107/S205225251600943X

Title: Three-dimensional nanostructure determination from a large diffraction data set recorded using scanning electron nanodiffraction

Journal Article · Mon Jul 04 00:00:00 EDT 2016 · IUCrJ

DOI:https://doi.org/10.1107/S205225251600943X· OSTI ID:1326114

Meng, Yifei; Zuo, Jian-Min

A diffraction-based technique is developed for the determination of three-dimensional nanostructures. The technique employs high-resolution and low-dose scanning electron nanodiffraction (SEND) to acquire three-dimensional diffraction patterns, with the help of a special sample holder for large-angle rotation. Grains are identified in three-dimensional space based on crystal orientation and on reconstructed dark-field images from the recorded diffraction patterns. Application to a nanocrystalline TiN thin film shows that the three-dimensional morphology of columnar TiN grains of tens of nanometres in diameter can be reconstructed using an algebraic iterative algorithm under specified prior conditions, together with their crystallographic orientations. The principles can be extended to multiphase nanocrystalline materials as well. Furthermore, the tomographic SEND technique provides an effective and adaptive way of determining three-dimensional nanostructures.

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Research Organization:: Univ. of Illinois at Urbana-Champaign, IL (United States)

Sponsoring Organization:: USDOE Office of Science (SC)

Grant/Contract Number:: FG02-01ER45923

OSTI ID:: 1326114

Alternate ID(s):: OSTI ID: 1361393

Journal Information:: IUCrJ, Journal Name: IUCrJ Vol. 3 Journal Issue: 5; ISSN 2052-2525

Publisher:: International Union of CrystallographyCopyright Statement

Country of Publication:: United Kingdom

Language:: English

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Cited by: 19 works

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Title: Three-dimensional nanostructure determination from a large diffraction data set recorded using scanning electron nanodiffraction

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