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Title: Three-dimensional nanostructure determination from a large diffraction data set recorded using scanning electron nanodiffraction

A diffraction-based technique is developed for the determination of three-dimensional nanostructures. The technique employs high-resolution and low-dose scanning electron nanodiffraction (SEND) to acquire three-dimensional diffraction patterns, with the help of a special sample holder for large-angle rotation. Grains are identified in three-dimensional space based on crystal orientation and on reconstructed dark-field images from the recorded diffraction patterns. Application to a nanocrystalline TiN thin film shows that the three-dimensional morphology of columnar TiN grains of tens of nanometres in diameter can be reconstructed using an algebraic iterative algorithm under specified prior conditions, together with their crystallographic orientations. The principles can be extended to multiphase nanocrystalline materials as well. Furthermore, the tomographic SEND technique provides an effective and adaptive way of determining three-dimensional nanostructures.
 [1] ;  [1]
  1. Univ. of Illinois at Urbana-Champaign, Urbana, IL (United States)
Publication Date:
OSTI Identifier:
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Published Article
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Additional Journal Information:
Journal Volume: 3; Journal Issue: 5; Journal ID: ISSN 2052-2525
International Union of Crystallography
Research Org:
Univ. of Illinois at Urbana-Champaign, Urbana, IL (United States)
Sponsoring Org:
USDOE Office of Science (SC)
Country of Publication:
United States
36 MATERIALS SCIENCE; three-dimensional nanostructure; scanning electron diffraction; diffraction tomography; inorganic materials; nanocrystalline TiN films; crystal morphology