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Title: Multi-channel gas-delivery system

One embodiment of the present invention provides a gas-delivery system for delivering reaction gas to a reactor chamber. The gas-delivery system includes a main gas-inlet port for receiving reaction gases and a gas-delivery plate that includes a plurality of gas channels. A gas channel includes a plurality of gas holes for allowing the reaction gases to enter the reactor chamber from the gas channel. The gas-delivery system further includes a plurality of sub-gas lines coupling together the main gas-inlet port and the gas-delivery plate, and a respective sub-gas line is configured to deliver a portion of the received reaction gases to a corresponding gas channel.
Authors:
; ;
Publication Date:
OSTI Identifier:
1324687
Report Number(s):
9,441,295
12/952,127
DOE Contract Number:
EE0000589
Resource Type:
Patent
Resource Relation:
Patent File Date: 2010 Nov 22
Research Org:
SolarCity Corporation, San Mateo, CA (United States)
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING; 14 SOLAR ENERGY