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Title: Monolithic active pixel radiation detector with shielding techniques

A monolithic active pixel radiation detector including a method of fabricating thereof. The disclosed radiation detector can include a substrate comprising a silicon layer upon which electronics are configured. A plurality of channels can be formed on the silicon layer, wherein the plurality of channels are connected to sources of signals located in a bulk part of the substrate, and wherein the signals flow through electrically conducting vias established in an isolation oxide on the substrate. One or more nested wells can be configured from the substrate, wherein the nested wells assist in collecting charge carriers released in interaction with radiation and wherein the nested wells further separate the electronics from the sensing portion of the detector substrate. The detector can also be configured according to a thick SOA method of fabrication.
Authors:
Publication Date:
OSTI Identifier:
1320832
Report Number(s):
9,437,771
13/893,514
DOE Contract Number:
AC02-07CH11359
Resource Type:
Patent
Resource Relation:
Patent File Date: 2013 May 14
Research Org:
Fermi National Accelerator Laboratory (FNAL), Batavia, IL (United States)
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY