Laser Ablation of Thin Films on LTCC.

Conference · Fri Aug 01 00:00:00 EDT 2014

DOI:https://doi.org/10.4071/isom-WP33· OSTI ID:1315265

Girardi, M. A.; Peterson, Kenneth A.; Vianco, Paul T.; Grondin, R.; Wieliczka, D.

Abstract not provided.

• Research Organization: Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
• Sponsoring Organization: USDOE National Nuclear Security Administration (NNSA)
• DOE Contract Number: AC04-94AL85000
• OSTI ID: 1315265
• Report Number(s): SAND2014-16611C; 534516
• Resource Relation: Journal Volume: 2014; Journal Issue: 1; Conference: Proposed for presentation at the IMAPS 2014--47th International Symposium on Microelectronics held October 13-16, 2014 in San Diego, CA.
• Country of Publication: United States
• Language: English