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Title: Full information acquisition and analysis of reflection high energy electron diffraction data for epitaxial growth processes

Authors:
 [1] ;  [1]
  1. ORNL
Publication Date:
OSTI Identifier:
1295110
DOE Contract Number:
AC05-00OR22725
Resource Type:
Conference
Resource Relation:
Conference: Microscopy and Microanalysis, Columbus, OH, USA, 20160724, 20160728
Research Org:
Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States). Center for Nanophase Materials Sciences (CNMS)
Sponsoring Org:
USDOE Office of Science (SC)
Country of Publication:
United States
Language:
English
Subject:
RHEED; surface diffraction; PCA; epitaxial growth