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This content will become publicly available on August 15, 2017

Title: Vapor deposition of molybdenum oxide using bis(ethylbenzene) molybdenum and water

Authors:
;
Publication Date:
OSTI Identifier:
1294703
Grant/Contract Number:
FG02-03-ER15457
Type:
Publisher's Accepted Manuscript
Journal Name:
Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films
Additional Journal Information:
Journal Volume: 34; Journal Issue: 5; Related Information: CHORUS Timestamp: 2016-12-25 21:48:19; Journal ID: ISSN 0734-2101
Publisher:
American Vacuum Society
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English