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Title: Inductively Coupled Plasma Etching of Benzocyclobutene with SF6 Chemistry.

Abstract not provided.
Authors:
; ; ;
Publication Date:
OSTI Identifier:
1294181
Report Number(s):
SAND2012-3948C
534097
DOE Contract Number:
AC04-94AL85000
Resource Type:
Conference
Resource Relation:
Conference: Proposed for presentation at the International conference on electron, ion and photon beam technology and nanofabrication held May 29 - June 1, 2012 in Waikoloa, HI.
Research Org:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org:
USDOE National Nuclear Security Administration (NNSA)
Country of Publication:
United States
Language:
English