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Title: Low temperature deep reactive ion etching :

Abstract not provided.
Authors:
; ; ; ;
Publication Date:
OSTI Identifier:
1288865
Report Number(s):
SAND2011-3530C
480502
DOE Contract Number:
AC04-94AL85000
Resource Type:
Conference
Resource Relation:
Conference: Proposed for presentation at the NMAVS Conference held May 24, 2011 in Albuquerque, NM.
Research Org:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org:
USDOE National Nuclear Security Administration (NNSA)
Country of Publication:
United States
Language:
English