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Title: Direct Release of Sombrero-Shaped Magnetite Nanoparticles via Nanoimprint Lithography

Magnetic nanoparticles produced via nanoimprint lithography can change the current paradigm of fabrication processes from chemical “bottom-up” synthesis to “top-down” fabrication. The combination of controlled nondirectional magnetron sputtering, ETFE mold, bilayer lift-off, and dry etching release can control the shape, size, and structure of the fabricated nanoparticles. The resulting magnetic nanoparticles have a novel “sombrero” shape with complex and unique physical/magnetic properties.
Authors:
 [1] ;  [2] ;  [1] ;  [1]
  1. Department of Materials Science and Engineering, University of Washington, Seattle WA 98195 USA
  2. Argonne National Laboratory, Lemont IL 60439 USA
Publication Date:
OSTI Identifier:
1287491
DOE Contract Number:
AC02-06CH11357
Resource Type:
Journal Article
Resource Relation:
Journal Name: Advanced Materials Interfaces; Journal Volume: 2; Journal Issue: 3
Publisher:
Wiley-VCH
Research Org:
Argonne National Lab. (ANL), Argonne, IL (United States)
Sponsoring Org:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22). Materials Sciences and Engineering Division
Country of Publication:
United States
Language:
English
Subject:
77 NANOSCIENCE AND NANOTECHNOLOGY