Micropores and methods of making and using thereof
Abstract
Disclosed herein are methods of making micropores of a desired height and/or width between two isotropic wet etched features in a substrate which comprises single-level isotropic wet etching the two features using an etchant and a mask distance that is less than 2.times. a set etch depth. Also disclosed herein are methods using the micropores and microfluidic devices comprising the micropores.
- Inventors:
- Publication Date:
- Research Org.:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1280743
- Patent Number(s):
- 9,404,913
- Application Number:
- 14/057,170
- Assignee:
- Sandia Corporation (Albuquerque, NM)
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2013 Oct 18
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY; 59 BASIC BIOLOGICAL SCIENCES
Citation Formats
Perroud, Thomas D., Patel, Kamlesh D., and Meagher, Robert J. Micropores and methods of making and using thereof. United States: N. p., 2016.
Web.
Perroud, Thomas D., Patel, Kamlesh D., & Meagher, Robert J. Micropores and methods of making and using thereof. United States.
Perroud, Thomas D., Patel, Kamlesh D., and Meagher, Robert J. 2016.
"Micropores and methods of making and using thereof". United States. https://www.osti.gov/servlets/purl/1280743.
@article{osti_1280743,
title = {Micropores and methods of making and using thereof},
author = {Perroud, Thomas D. and Patel, Kamlesh D. and Meagher, Robert J.},
abstractNote = {Disclosed herein are methods of making micropores of a desired height and/or width between two isotropic wet etched features in a substrate which comprises single-level isotropic wet etching the two features using an etchant and a mask distance that is less than 2.times. a set etch depth. Also disclosed herein are methods using the micropores and microfluidic devices comprising the micropores.},
doi = {},
url = {https://www.osti.gov/biblio/1280743},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Aug 02 00:00:00 EDT 2016},
month = {Tue Aug 02 00:00:00 EDT 2016}
}
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