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Title: Micropores and methods of making and using thereof

Abstract

Disclosed herein are methods of making micropores of a desired height and/or width between two isotropic wet etched features in a substrate which comprises single-level isotropic wet etching the two features using an etchant and a mask distance that is less than 2.times. a set etch depth. Also disclosed herein are methods using the micropores and microfluidic devices comprising the micropores.

Inventors:
; ;
Publication Date:
Research Org.:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1280743
Patent Number(s):
9,404,913
Application Number:
14/057,170
Assignee:
Sandia Corporation (Albuquerque, NM)
Resource Type:
Patent
Resource Relation:
Patent File Date: 2013 Oct 18
Country of Publication:
United States
Language:
English
Subject:
37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY; 59 BASIC BIOLOGICAL SCIENCES

Citation Formats

Perroud, Thomas D., Patel, Kamlesh D., and Meagher, Robert J. Micropores and methods of making and using thereof. United States: N. p., 2016. Web.
Perroud, Thomas D., Patel, Kamlesh D., & Meagher, Robert J. Micropores and methods of making and using thereof. United States.
Perroud, Thomas D., Patel, Kamlesh D., and Meagher, Robert J. 2016. "Micropores and methods of making and using thereof". United States. https://www.osti.gov/servlets/purl/1280743.
@article{osti_1280743,
title = {Micropores and methods of making and using thereof},
author = {Perroud, Thomas D. and Patel, Kamlesh D. and Meagher, Robert J.},
abstractNote = {Disclosed herein are methods of making micropores of a desired height and/or width between two isotropic wet etched features in a substrate which comprises single-level isotropic wet etching the two features using an etchant and a mask distance that is less than 2.times. a set etch depth. Also disclosed herein are methods using the micropores and microfluidic devices comprising the micropores.},
doi = {},
url = {https://www.osti.gov/biblio/1280743}, journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Aug 02 00:00:00 EDT 2016},
month = {Tue Aug 02 00:00:00 EDT 2016}
}

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