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This content will become publicly available on July 29, 2017

Title: X-ray diffraction gratings: Precise control of ultra-low blaze angle via anisotropic wet etching

Authors:
; ; ; ; ;
Publication Date:
OSTI Identifier:
1275973
Grant/Contract Number:
AC02-05CH11231
Type:
Publisher's Accepted Manuscript
Journal Name:
Applied Physics Letters
Additional Journal Information:
Journal Volume: 109; Journal Issue: 4; Related Information: CHORUS Timestamp: 2016-12-27 18:05:14; Journal ID: ISSN 0003-6951
Publisher:
American Institute of Physics
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English