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Title: HRXRD for in-line monitoring of advanced FD-SOI technology: Use-cases: AM: Advanced metrology

Authors:
; ; ; ; ; ; ;  [1] ;  [2] ;  [2]
  1. (Grenoble)
  2. (
Publication Date:
OSTI Identifier:
1259875
Resource Type:
Conference
Resource Relation:
Conference: 2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) ;May 16-19, 2016;Saratoga Springs, NY
Publisher:
2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) ;IEEE;37-43
Research Org:
Advanced Photon Source (APS), Argonne National Laboratory (ANL), Argonne, IL (US)
Sponsoring Org:
DOE - BASIC ENERGY SCIENCES
Country of Publication:
United States
Language:
ENGLISH