Nanofabrication on unconventional substrates using transferred hard masks

Li, Luozhou; Bayn, Igal; Lu, Ming; Nam, Chang -Yong; Schroder, Tim; Stein, Aaron; Harris, Nicholas C.; Englund, Dirk

doi:10.1038/srep07802

Title: Nanofabrication on unconventional substrates using transferred hard masks

Journal Article · Thu Jan 15 00:00:00 EST 2015 · Scientific Reports

DOI:https://doi.org/10.1038/srep07802· OSTI ID:1258778

Li, Luozhou ^[1]; Bayn, Igal ^[1]; Lu, Ming ^[2]; Nam, Chang -Yong ^[2]; Schroder, Tim ^[1]; Stein, Aaron ^[3]; Harris, Nicholas C. ^[1]; Englund, Dirk ^[1]

Massachusetts Inst. of Technology (MIT), Cambridge, MA (United States). Dept. of Electrical Engineering and Computer Science
Brookhaven National Lab. (BNL), Upton, NY (United States). Center for Functional Nanomaterials (CFN)
Brookhaven National Lab. (BNL), Upton, NY (United States). Center for Functional Nanomaterials

Here, a major challenge in nanofabrication is to pattern unconventional substrates that cannot be processed for a variety of reasons, such as incompatibility with spin coating, electron beam lithography, optical lithography, or wet chemical steps. Here, we present a versatile nanofabrication method based on re-usable silicon membrane hard masks, patterned using standard lithography and mature silicon processing technology. These masks, transferred precisely onto targeted regions, can be in the millimetre scale. They allow for fabrication on a wide range of substrates, including rough, soft, and non-conductive materials, enabling feature linewidths down to 10 nm. Plasma etching, lift-off, and ion implantation are realized without the need for scanning electron/ion beam processing, UV exposure, or wet etching on target substrates.

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Research Organization:: Brookhaven National Laboratory (BNL), Upton, NY (United States)

Sponsoring Organization:: USDOE

Grant/Contract Number:: AC02-98CH10886

OSTI ID:: 1258778

Journal Information:: Scientific Reports, Vol. 5; ISSN 2045-2322

Publisher:: Nature Publishing GroupCopyright Statement

Country of Publication:: United States

Language:: English

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Cited by: 40 works

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References (63)

Soft Lithography Xia, Younan; Whitesides, George M. Angewandte Chemie International Edition, Vol. 37, Issue 5 https://doi.org/10.1002/(sici)1521-3773(19980316)37:5<550::aid-anie550>3.3.co;2-7	journal	March 1998
Imprint Lithography with 25-Nanometer Resolution Chou, S. Y.; Krauss, P. R.; Renstrom, P. J. Science, Vol. 272, Issue 5258, p. 85-87 https://doi.org/10.1126/science.272.5258.85	journal	April 1996
Scattering with angular limitation projection electron beam lithography for suboptical lithography Harriott, Lloyd R. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 15, Issue 6 https://doi.org/10.1116/1.589339	journal	November 1997
One- and two-dimensional photonic crystal micro-cavities in single crystal diamond Riedrich-Möller, Janine; Kipfstuhl, Laura; Hepp, Christian arXiv https://doi.org/10.48550/arxiv.1109.4595	text	January 2011
Photonic Crystals Meade, Robert D. VE; Johnson, Steven G.; Winn, Joshua N. https://doi.org/10.1515/9781400828241	book	December 2008
Electron beam lithography Pease, R. F. W. Contemporary Physics, Vol. 22, Issue 3 https://doi.org/10.1080/00107518108231531	journal	May 1981
Metallic Nanowires by Full Wafer Stencil Lithography Vazquez-Mena, O.; Villanueva, G.; Savu, V. Nano Letters, Vol. 8, Issue 11, p. 3675-3682 https://doi.org/10.1021/nl801778t	journal	November 2008
High resolution ion beam lithography at large gaps using stencil masks Randall, J. N.; Flanders, D. C.; Economou, N. P. Applied Physics Letters, Vol. 42, Issue 5 https://doi.org/10.1063/1.93969	journal	March 1983
Nanophotonic Filters and Integrated Networks in Flexible 2D Polymer Photonic Crystals Gan, Xuetao; Clevenson, Hannah; Tsai, Cheng-Chia arXiv https://doi.org/10.48550/arxiv.1307.5621	text	January 2013
Spray coating of PMMA for pattern transfer via electron beam lithography on surfaces with high topography Linden, J.; Thanner, Ch.; Schaaf, B. Microelectronic Engineering, Vol. 88, Issue 8 https://doi.org/10.1016/j.mee.2010.12.106	journal	August 2011
Unconventional Methods for Fabricating and Patterning Nanostructures Xia, Younan; Rogers, John A.; Paul, Kateri E. Chemical Reviews, Vol. 99, Issue 7, p. 1823-1848 https://doi.org/10.1021/cr980002q	journal	May 1999
Fiber-Integrated Diamond-Based Single Photon Source Schröder, Tim; Schell, Andreas W.; Kewes, Günter Nano Letters, Vol. 11, Issue 1 https://doi.org/10.1021/nl103434r	journal	January 2011
Simple Fabrication of Molecular Circuits by Shadow Mask Evaporation Zhou, Y. X.; Johnson, Alan T.; Hone, James Nano Letters, Vol. 3, Issue 10, p. 1371-1374 https://doi.org/10.1021/nl034512y	journal	October 2003
Diameter-Dependent Electromechanical Properties of GaN Nanowires Nam, Chang-Yong; Jaroenapibal, Papot; Tham, Douglas Nano Letters, Vol. 6, Issue 2 https://doi.org/10.1021/nl051860m	journal	February 2006
Monolithic Microfabricated Valves and Pumps by Multilayer Soft Lithography Unger, M. A. Science, Vol. 288, Issue 5463 https://doi.org/10.1126/science.288.5463.113	journal	April 2000
Flexible and tunable silicon photonic circuits on plastic substrates Chen, Yu; Li, Huan; Li, Mo Scientific Reports, Vol. 2, Issue 1 https://doi.org/10.1038/srep00622	journal	September 2012
Patterning the Tips of Optical Fibers with Metallic Nanostructures Using Nanoskiving Lipomi, Darren J.; Martinez, Ramses V.; Kats, Mikhail A. Nano Letters, Vol. 11, Issue 2 https://doi.org/10.1021/nl103730g	journal	February 2011
Electron Beam Lithography Constancias, Christophe; Landis, Stefan; Manakli, Serdar Lithography https://doi.org/10.1002/9781118557662.ch3	book	March 2013
Reactive ion etching: Optimized diamond membrane fabrication for transmission electron microscopy Li, Luozhou; Trusheim, Matthew; Gaathon, Ophir Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 31, Issue 6 https://doi.org/10.1116/1.4813559	journal	November 2013
Micro-Nanostructured Interfaces Fabricated by the Use of Inorganic Block Copolymer Micellar Monolayers as Negative Resist for Electron-Beam Lithography Glass, R.; Arnold, M.; Blümmel, J. Advanced Functional Materials, Vol. 13, Issue 7 https://doi.org/10.1002/adfm.200304331	journal	July 2003
Microstructure and Composition of Focused-Ion-Beam-Deposited Pt Contacts to GaN Nanowires Tham, D.; Nam, C. -Y.; Fischer, J. E. Advanced Materials, Vol. 18, Issue 3 https://doi.org/10.1002/adma.200501832	journal	February 2006
A three-dimensional optical photonic crystal with designed point defects Qi, Minghao; Lidorikis, Elefterios; Rakich, Peter T. Nature, Vol. 429, Issue 6991 https://doi.org/10.1038/nature02575	journal	June 2004
Single-Crystal Diamond Nanomechanical Resonators with Quality Factors exceeding one Million Tao, Y.; Boss, J. M.; Moores, B. A. arXiv https://doi.org/10.48550/arxiv.1212.1347	text	January 2012
Optimized surface-enhanced Raman scattering on gold nanoparticle arrays Félidj, N.; Aubard, J.; Lévi, G. Applied Physics Letters, Vol. 82, Issue 18 https://doi.org/10.1063/1.1571979	journal	May 2003
Nano patterning on optical fiber and laser diode facet with dry resist Kelkar, P. S.; Beauvais, J.; Lavallée, E. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 22, Issue 3 https://doi.org/10.1116/1.1667503	journal	January 2004
Electron Beam Lithography Nonogaki, Saburo; Takumi, Ueno; Ito, Toshio Microlithography Fundamentals in Semiconductor Devices and Fabrication Technology https://doi.org/10.1201/9781315214825-12	book	October 2018
One- and two-dimensional photonic crystal microcavities in single crystal diamond Riedrich-Möller, Janine; Kipfstuhl, Laura; Hepp, Christian Nature Nanotechnology, Vol. 7, Issue 1 https://doi.org/10.1038/nnano.2011.190	journal	November 2011
Coupling of NV Centers to Photonic Crystal Nanobeams in Diamond Hausmann, B. J. M.; Shields, B. J.; Quan, Q. Nano Letters, Vol. 13, Issue 12 https://doi.org/10.1021/nl402174g	journal	November 2013
A Technique to Transfer Metallic Nanoscale Patterns to Small and Non-Planar Surfaces Smythe, Elizabeth J.; Dickey, Michael D.; Whitesides, George M. ACS Nano, Vol. 3, Issue 1 https://doi.org/10.1021/nn800720r	journal	December 2008
Electron Beam Lithography on Irregular Surfaces Using an Evaporated Resist Zhang, Jian; Con, Celal; Cui, Bo ACS Nano, Vol. 8, Issue 4 https://doi.org/10.1021/nn4064659	journal	March 2014
Fabrication of ultrahigh aspect ratio freestanding gratings on silicon-on-insulator wafers Ahn, Minseung; Heilmann, Ralf K.; Schattenburg, Mark L. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 25, Issue 6 https://doi.org/10.1116/1.2779048	journal	January 2007
Mid-infrared optical parametric amplifier using silicon nanophotonic waveguides Liu, Xiaoping; Osgood, Richard M.; Vlasov, Yurii A. Nature Photonics, Vol. 4, Issue 8 https://doi.org/10.1038/nphoton.2010.119	journal	May 2010
Photonic Crystals Joannopoulos, John D.; Johnson, Steven G.; Winn, Joshua N. https://doi.org/10.2307/j.ctvcm4gz9	book	January 2011
Diamond nonlinear photonics Hausmann, B. J. M.; Bulu, I.; Venkataraman, V. Nature Photonics, Vol. 8, Issue 5 https://doi.org/10.1038/nphoton.2014.72	journal	April 2014
Fabrication of micro-optical devices at the end of a multimode optical fiber with negative tone lift-off EBL Sundaram, Vijay M.; Wen, Sy-Bor Journal of Micromechanics and Microengineering, Vol. 22, Issue 12 https://doi.org/10.1088/0960-1317/22/12/125016	journal	November 2012
Atomic Layer Deposition: An Overview George, Steven M. Chemical Reviews, Vol. 110, Issue 1, p. 111-131 https://doi.org/10.1021/cr900056b	journal	January 2010
Surface damage formation during ion-beam thinning of samples for transmission electron microscopy McCaffrey, J. P.; Phaneuf, M. W.; Madsen, L. D. Ultramicroscopy, Vol. 87, Issue 3 https://doi.org/10.1016/S0304-3991(00)00096-6	journal	April 2001
Lift-off metallization using poly(methyl methacrylate) exposed with a scanning tunneling microscope McCord, M. A. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 6, Issue 1 https://doi.org/10.1116/1.583981	journal	January 1988
Optical Fiber Tips Functionalized with Semiconductor Photonic Crystal Cavities Shambat, Gary; Provine, J.; Rivoire, Kelley CLEO: Science and Innovations, Conference on Lasers and Electro-Optics 2012 https://doi.org/10.1364/cleo_si.2012.cm1m.5	conference	January 2012
Single digit nanofabrication by step-and-repeat nanoimprint lithography Peroz, C.; Dhuey, S.; Cornet, M. Nanotechnology, Vol. 23, Issue 1 https://doi.org/10.1088/0957-4484/23/1/015305	journal	December 2011
Single-crystal diamond nanomechanical resonators with quality factors exceeding one million Tao, Y.; Boss, J. M.; Moores, B. A. Nature Communications, Vol. 5, Issue 1 https://doi.org/10.1038/ncomms4638	journal	April 2014
Flexible metal grating based optical fiber probe for photonic integrated circuits Scheerlinck, Stijn; Taillaert, Dirk; Van Thourhout, Dries Applied Physics Letters, Vol. 92, Issue 3 https://doi.org/10.1063/1.2827589	journal	January 2008
Electron beam lithography Herriott, D. R. Vacuum, Vol. 35, Issue 8, p. 336 https://doi.org/10.1016/0042-207x(85)90207-6	journal	August 1985
Resolution Enhancement Techniques in Optical Lithography Wong, Alfred Kwok-Kit https://doi.org/10.1117/3.401208	book	March 2001
Coupling of quantum-dot light emission with a three-dimensional photonic-crystal nanocavity Aoki, Kanna; Guimard, Denis; Nishioka, Masao Nature Photonics, Vol. 2, Issue 11 https://doi.org/10.1038/nphoton.2008.202	journal	October 2008
Lithography and Other Patterning Techniques for Future Electronics Pease, R. F.; Chou, S. Y. Proceedings of the IEEE, Vol. 96, Issue 2 https://doi.org/10.1109/JPROC.2007.911853	journal	February 2008
Transfer printing by kinetic control of adhesion to an elastomeric stamp Meitl, Matthew A.; Zhu, Zheng-Tao; Kumar, Vipan Nature Materials, Vol. 5, Issue 1, p. 33-38 https://doi.org/10.1038/nmat1532	journal	December 2005
An exercise in self control Lipson, Michal Nature Photonics, Vol. 1, Issue 1 https://doi.org/10.1038/nphoton.2006.63	journal	January 2007
Mask fabrication for projection electron-beam lithography incorporating the SCALPEL technique Liddle, J. A. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 9, Issue 6 https://doi.org/10.1116/1.585357	journal	November 1991
Projection electron-beam lithography: A new approach Berger, S. D. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 9, Issue 6 https://doi.org/10.1116/1.585356	journal	November 1991
4D imaging reveals mechanisms of clay-carbon protection and release Yang, Judy Q.; Zhang, Xinning; Bourg, Ian C. Nature Communications, Vol. 12, Issue 1 https://doi.org/10.1038/s41467-020-20798-6	journal	January 2021
Step and Flash Nano Imprint Lithography of 80 nm Dense Line Pattern Using Trehalose Derivative Resist Material Takei, Satoshi Applied Physics Express, Vol. 3, Issue 2 https://doi.org/10.1143/APEX.3.025202	journal	February 2010
Nanophotonic Filters and Integrated Networks in Flexible 2D Polymer Photonic Crystals Gan, Xuetao; Clevenson, Hannah; Tsai, Cheng-Chia Scientific Reports, Vol. 3, Issue 1 https://doi.org/10.1038/srep02145	journal	July 2013
Soft Lithography Xia, Younan; Whitesides, George M. Annual Review of Materials Science, Vol. 28, Issue 1, p. 153-184 https://doi.org/10.1146/annurev.matsci.28.1.153	journal	August 1998
Effect of cold development on improvement in electron-beam nanopatterning resolution and line roughness Ocola, L. E.; Stein, A. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 24, Issue 6 https://doi.org/10.1116/1.2366698	journal	January 2006
Imprints offer Moore Pease, R. Fabian Nature, Vol. 417, Issue 6891 https://doi.org/10.1038/417802a	journal	June 2002
Lasing oscillation in a three-dimensional photonic crystal nanocavity with a complete bandgap Tandaechanurat, Aniwat; Ishida, Satomi; Guimard, Denis Nature Photonics, Vol. 5, Issue 2 https://doi.org/10.1038/nphoton.2010.286	journal	December 2010
Mid-infrared optical parametric amplifier using silicon nanophotonic waveguides Liu, Xiaoping; Osgood, Richard M.; Vlasov, Yurii A. arXiv https://doi.org/10.48550/arxiv.1001.1533	text	January 2010
Fabrication of surface reliefs on facets of singlemode optical fibres using nanoimprint lithography Viheriälä, J.; Niemi, T.; Kontio, J. Electronics Letters, Vol. 43, Issue 3 https://doi.org/10.1049/el:20073075	journal	January 2007
Nanofabrication using a stencil mask Deshmukh, Mandar M.; Ralph, D. C.; Thomas, M. Applied Physics Letters, Vol. 75, Issue 11 https://doi.org/10.1063/1.124777	journal	September 1999
Lasing oscillation in a three-dimensional photonic crystal nanocavity with a complete bandgap Tandaechanurat, Aniwat; Ishida, Satomi; Guimard, Denis arXiv https://doi.org/10.48550/arxiv.1006.1680	text	January 2010
Optical fiber tips functionalized with semiconductor photonic crystal cavities Shambat, Gary; Provine, J.; Rivoire, Kelley Applied Physics Letters, Vol. 99, Issue 19 https://doi.org/10.1063/1.3660278	journal	November 2011
Indirect Nanofabrication Cui, Zheng Nanofabrication https://doi.org/10.1007/978-0-387-75577-9_7	book	January 2008

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Diamond as a Platform for Integrated Quantum Photonics Lenzini, Francesco; Gruhler, Nico; Walter, Nicolai Advanced Quantum Technologies, Vol. 1, Issue 3 https://doi.org/10.1002/qute.201800061	journal	October 2018
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