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Title: Fully CMOS-compatible titanium nitride nanoantennas

Authors:
 [1] ;  [2] ;  [3] ;  [2] ;  [3] ;  [2]
  1. Department of Applied Physics, Stanford University, 348 Via Pueblo Mall, Stanford, California 94305, USA; Department of Materials Science and Engineering, Stanford University, 496 Lomita Mall, Stanford, California 94305, USA
  2. Department of Materials Science and Engineering, Stanford University, 496 Lomita Mall, Stanford, California 94305, USA
  3. Department of Physics, Stanford University, 382 Via Pueblo Mall, Stanford, California 94305, USA
Publication Date:
OSTI Identifier:
1256740
DOE Contract Number:
FA9550-15-1-0006; AC02-76SF00515; SC0001293
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 108; Journal Issue: 5
Research Org:
SLAC National Accelerator Laboratory (SLAC), Menlo Park, CA (United States)
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English