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Title: Schottky Barrier Catalysis Mechanism in Metal-Assisted Chemical Etching of Silicon

Authors:
; ; ;
Publication Date:
OSTI Identifier:
1256464
DOE Contract Number:
EE0004946; AC02-76SF00515
Resource Type:
Journal Article
Resource Relation:
Journal Name: ACS Applied Materials and Interfaces; Journal Volume: 8; Journal Issue: 14
Research Org:
SLAC National Accelerator Laboratory (SLAC), Menlo Park, CA (United States)
Sponsoring Org:
USDOE Office of Energy Efficiency and Renewable Energy (EERE)
Country of Publication:
United States
Language:
English