Schottky Barrier Catalysis Mechanism in Metal-Assisted Chemical Etching of Silicon

Lai, Ruby A.; Hymel, Thomas M.; Narasimhan, Vijay K.; Cui, Yi

doi:10.1021/acsami.6b01020

Title: Schottky Barrier Catalysis Mechanism in Metal-Assisted Chemical Etching of Silicon

Journal Article · Mon Mar 28 00:00:00 EDT 2016 · ACS Applied Materials and Interfaces

DOI:https://doi.org/10.1021/acsami.6b01020· OSTI ID:1579822

Lai, Ruby A. ^[1]; Hymel, Thomas M. ^[1]; Narasimhan, Vijay K. ^[1]; Cui, Yi ^[2]

Stanford Univ., CA (United States)
SLAC National Accelerator Lab., Menlo Park, CA (United States)

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Research Organization:: Stanford Univ., CA (United States); SLAC National Accelerator Laboratory (SLAC), Menlo Park, CA (United States)

Sponsoring Organization:: USDOE Office of Energy Efficiency and Renewable Energy (EERE); National Science Foundation (NSF)

Grant/Contract Number:: EE0004946; AC02-76SF00515

OSTI ID:: 1579822

Alternate ID(s):: OSTI ID: 1256464

Journal Information:: ACS Applied Materials and Interfaces, Vol. 8, Issue 14; ISSN 1944-8244

Publisher:: American Chemical Society (ACS)Copyright Statement

Country of Publication:: United States

Language:: English

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Cited by: 79 works

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References (28)

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Interfacial Contact is Required for Metal-Assisted Plasma Etching of Silicon Sun, Julia B.; Almquist, Benjamin D. Advanced Materials Interfaces, Vol. 5, Issue 24 https://doi.org/10.1002/admi.201800836	journal	October 2018
Low Cost and High‐Aspect Ratio Micro/Nano Device Fabrication by Using Innovative Metal‐Assisted Chemical Etching Method Van Toan, Nguyen; Wang, Xiaoyue; Inomata, Naoki Advanced Engineering Materials, Vol. 21, Issue 8 https://doi.org/10.1002/adem.201900490	journal	May 2019
Hybrid Anodic and Metal-Assisted Chemical Etching Method Enabling Fabrication of Silicon Carbide Nanowires Chen, Yun; Zhang, Cheng; Li, Liyi Small, Vol. 15, Issue 7 https://doi.org/10.1002/smll.201803898	journal	January 2019
Communication—Black GaAs with Sub-Wavelength Nanostructures Fabricated via Lithography-Free Metal-Assisted Chemical Etching Wilhelm, Thomas S.; Kolberg, Alex P.; Baboli, Mohadeseh A. ECS Journal of Solid State Science and Technology, Vol. 8, Issue 6 https://doi.org/10.1149/2.0311906jss	journal	January 2019
Oxidant Concentration Modulated Metal/Silicon Interface Electrical Field Mediates Metal‐Assisted Chemical Etching of Silicon Wang, Jiang; Hu, Ya; Zhao, Haichuan Advanced Materials Interfaces, Vol. 5, Issue 23 https://doi.org/10.1002/admi.201801132	journal	August 2018
High-aspect-ratio microstructures with versatile slanting angles on silicon by uniform metal-assisted chemical etching Li, Liyi; Zhang, Cheng; Tuan, Chia-Chi Journal of Micromechanics and Microengineering, Vol. 28, Issue 5 https://doi.org/10.1088/1361-6439/aaaf2f	journal	March 2018
Metal Nanoparticle-Decorated Silicon Nanowire Arrays on Silicon Substrate and their Applications Roy, Abhijit; Satpati, Biswarup Microscopy and Microanalysis, Vol. 25, Issue 6 https://doi.org/10.1017/s1431927619014946	journal	September 2019
Unraveling the Morphological Evolution and Etching Kinetics of Porous Silicon Nanowires During Metal-Assisted Chemical Etching Vinzons, Lester U.; Shu, Lei; Yip, SenPo Nanoscale Research Letters, Vol. 12, Issue 1 https://doi.org/10.1186/s11671-017-2156-z	journal	June 2017
Minimization of Optical Reflectance by Copper Assisted Etching of Crystalline Silicon Surface Treideris, Marius; Rėza, Alfonsas; Kamarauskas, Mindaugas physica status solidi (a), Vol. 215, Issue 6 https://doi.org/10.1002/pssa.201700600	journal	January 2018
General corrosion during metal-assisted etching of n -type silicon using different metal catalysts of silver, gold, and platinum Matsumoto, Ayumu; Son, Hikoyoshi; Eguchi, Makiho RSC Advances, Vol. 10, Issue 1 https://doi.org/10.1039/c9ra08728a	journal	January 2020
Metal-assisted-chemical-etching of silicon nanowires for templating 3D graphene growth towards energy storage in microsystems Li, Jinhua; Van Toan, Nguyen; Wang, Zhuqing Journal of Micromechanics and Microengineering, Vol. 29, Issue 5 https://doi.org/10.1088/1361-6439/ab0b2f	journal	March 2019
Enhanced Surface Properties of Light-Trapping Si Nanowires Using Synergetic Effects of Metal-Assisted and Anisotropic Chemical Etchings Jeong, Youngsoon; Hong, Chanwoo; Jung, Yeong Hun Scientific Reports, Vol. 9, Issue 1 https://doi.org/10.1038/s41598-019-52382-4	journal	November 2019
Contact electrification induced interfacial reactions and direct electrochemical nanoimprint lithography in n-type gallium arsenate wafer Zhang, Jie; Zhang, Lin; Wang, Wei Chemical Science, Vol. 8, Issue 3 https://doi.org/10.1039/c6sc04091h	journal	January 2017

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Title: Schottky Barrier Catalysis Mechanism in Metal-Assisted Chemical Etching of Silicon

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